Effect of Target Composition and Sputtering Parameters on Microstructure and Mechanical Properties of Vanadium Carbide Films
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OpenAlex topics: Metal and Thin Film Mechanics · Advanced materials and composites · High-Temperature Coating Behaviors
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References (12)
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8. Chen J G10.1016/0039-6028(94)90035-3 ↗
9. Liao M Y10.1116/1.2008273 ↗
10. Meng W J10.1063/1.372266 ↗
11. Aouni A10.1016/j.tsf.2004.08.139 ↗
12. SHEN Jie