退火温度对Bi 3.15 (Eu 0.7 Nd 0.15 )Ti 3 O 12 铁电薄膜力学性能的影响
Source abstract
Abstract
利用金属有机物分解法(MOD)在Pt/Ti/SiO 2 /Si(111)衬底上制备了Bi 3.15 (Eu 0.7 Nd 0.15 )Ti 3 O 12 (BENT)薄膜, 并经600℃、650℃、700℃、750℃退火处理。通过纳米压痕法测试了薄膜的硬度和弹性模量, 采用X射线衍射(XRD)测量了薄膜的残余应力。BENT薄膜的晶粒尺寸随着退火温度的升高而不断变大。当晶粒尺寸从37 nm增大到46 nm时, 薄膜的硬度值从8.4 GPa减少到3.1 GPa, 弹性模量从171.5 GPa减小到141.6 GPa。随着退火温度从600℃升高到750℃时, 薄膜的残余压应力值从–743 MPa减小到了–530 MPa。退火温度为600℃的BENT薄膜具有最大的硬度和弹性模量。
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Ferroelectric and Piezoelectric Materials · Intermetallics and Advanced Alloy Properties · Microwave Dielectric Ceramics Synthesis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
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