新型相变材料Ti 0.5 Sb 2 Te 3 刻蚀工艺及其机理研究
Source abstract
Abstract
采用CF 4 和Ar混合气体研究了新型相变材料Ti 0.5 Sb 2 Te 3 (TST)的刻蚀特性, 重点优化和研究了刻蚀气体总流速、CF 4 /Ar的比例、压力和功率等工艺参数对刻蚀形貌的影响。结果表明, 当气体总流量为50 sccm、CF 4 浓度为26%﹑刻蚀功率为400 W和刻蚀压力为13.3 Pa时, 刻蚀速度达到126 nm/min, TST薄膜刻蚀图形侧壁平整而且垂直度好(接近90°)﹑刻蚀表面平整(RMS为0.82 nm)以及刻蚀的片内均匀性等都非常好。
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Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Surface Treatment and Residual Stress · Titanium Alloys Microstructure and Properties · Advanced machining processes and optimization
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
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