Fabrication of Polycrystalline Silicon Films with Columnar Grains Structure on Quartz
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Research context
OpenAlex topics: Advanced Surface Polishing Techniques · Optical Coatings and Gratings · Thin-Film Transistor Technologies
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References (7)
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1. Armin G10.1016/j.jcrysgro.2005.11.050 ↗
2. Kondo M10.1016/S0927-0248(02)00451-8 ↗
3. Widenborg P I10.1016/S0022-0248(02)01388-X ↗
4. Green M A10.1016/S0038-092X(03)00187-7 ↗
5. JIN Rui-Min
6. Matsuyama T10.1016/0022-3093(96)00091-9 ↗
7. CzigaAny Zs10.1016/S0040-6090(98)01760-X ↗