Oxidation Behavior of Aluminium Nitride

The effects of atmosphere and humidity at different temperatures on the behavior of aluminium nitride were investigated. The resules obtained show that the oxidation behavior was greatly affected by the humidity. The oxidation of aluminium nitride at 1225℃ in wet N2, wet N2:O2=10:1 and wet air follows a parabolic rate law, while the oxidation in dry air follows a linear rate law. On the other hand, the oxidation kinetics in dry air is linear between 1100℃and 1300℃ with an activation energy of 233kJ/mol, and then parabolic above 1300℃.