Argon Ion Etching on Property of YBa2Cu3O7-x Thin Films Prepared by TFA-MOD Process
Source abstract
Abstract
TFA
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: ZnO doping and properties · Advanced ceramic materials synthesis · Copper Interconnects and Reliability
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (18)
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