DataVXJournal of Inorganic MaterialsPaper
journal article·2016Open access

Stress Induced Microstructure Evolution of AlN: Er Film at Different Annealing Temperature

YANG Ming-Ming, MO Ya-Juan, WANG Xiao-Dan, ZENG Xiong-Hui, LIU Xue-Hua, HUANG Jun, ZHANG Ji-Cai, WANG Jian-Feng, XU Ke

Journal of Inorganic Materials· Volume 31· Issue 3
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Materials processing

OpenAlex topics: GaN-based semiconductor devices and materials · Acoustic Wave Resonator Technologies · Advanced ceramic materials synthesis

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