Synthesis of Carbon Nanotube Junction by ECR-CVD

A new type of nanotube junction was synthesized with CH4/H2 and CH4/B2H6/H2 source gases in a continuous CVD process by electron cyclotron resonance chemical vapor deposition (ECR-CVD),Fe3O4 nanoparticle as the catalyst and porous silicon as the substrate. Scanning electron microscope (SEM) and transmission electron microscope (TEM) were used to evaluate the morphology and structure. The result shows that the junction is joined with a bamboo-like borondoped CNT at one side and a straight tubular CNT at another side. The junction grows via bottom-end growth mechanism, boron-doped CNT growing in first period is on the top of the nanotube junction.