Effects of Atomic Hydrogen on Growth of Nanodiamond Films

The effects of atomic hydrogen on the growth of nanodiamond films were explored under different conditions of preparation. It is believed hydrogen-poor is not the necessary factor for preparation of nanodiamond films. The mechanisms of atomic hydrogen and Ar are different between the condition of hydrogen-poor and hydrogen-rich. Substrate bias fixed, can promote the production of H+. H+ can etch sp2 carbon stronger than sp3 carbon, and can result in surface defects. Therefore, the condition of hydrogen-rich will be assistant to the nucleation and growth of nanodiamond films.