Preparation and Characterization of Micro-patterned BiFeO3 Films by Photolithography-self-assembly Method
Source abstract
Abstract
利用光刻自组装技术在玻璃基板上成功制备出图案化的BiFeO 3 薄膜. AFM和接触角测试表明, 紫外光照射引起十八烷基三氯硅烷(OTS)单层膜改性, 形成憎水的自组装单分子(SAM)区域和亲水的硅烷醇区域; XRD和XPS结果显示, OTS单层膜和紫外照射处理的玻璃基板表面诱导吸附的薄膜为纯相六方扭曲钙钛矿结构的BiFeO 3 薄膜; SEM和EDS表明, SAM区域沉积的BiFeO 3 薄膜不连续, 在超声波震荡下容易脱落, 而硅烷醇区域沉积的BiFeO 3 薄膜致密均一, 与基底结合牢固, 边缘轮廓清晰.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Multiferroics and related materials · Ferroelectric and Piezoelectric Materials · Transition Metal Oxide Nanomaterials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (18)
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