CVD Synthesis of Silicon Nitride (SiN) Nanopowders in a Novel Two-stage Fluidized Bed Reactor

Chemical vapor deposition (CVD) using silane and ammonia as reactants was employed to prepare SiN nanopowders in a novel two-stage fluidized bed reactor. The product was characterized by means of X-ray diffraction, transmission electron microscope and Fourier transform infrared spectroscope. Furthermore, optimal processing parameters were presented, and the critical factors for CVD synthesis of SiN nanopowders in the fluidized bed were discussed. The results show that the product is an amorphous silicon nitride with sphere nanomorphology. The synthesis route is promising for scale-up preparation of SiN nanopowders.