Preparation of Silicon Nanowires and Porous Silicon Composite Structure by Electrocatalytic Metal Assisted Chemical Etching
Source abstract
Abstract
The quantum confinement effect brings good field emission characteristics to silicon nanowires, which is expected to improve the performance of field emission device through combination with the quasiballistic electrons drift model in porous silicon structure, but the efficiency of traditional metal assisted chemical etching is low.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Silicon Nanostructures and Photoluminescence · Nanowire Synthesis and Applications · Semiconductor materials and interfaces
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (23)
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1. PIEDIMONTE P, MAZZETTA I, FUCILE S, et al. Silicon nanowires to detect electric signals from living cells. Materials Research Express, 2019,6(8):084005.10.1088/2053-1591/ab20f8 ↗
2. DIMAGGIO E, PENNELLI G. Potentialities of silicon nanowire forests for thermoelectric generation. Nanotechnology, 2018,29(13):135401.10.1088/1361-6528/aaa9a2 ↗
3. PENNELLI G, ELYAMNY S, DIMAGGIO E, et al. Thermal conductivity of silicon nanowire forests. Nanotechnology, 2018,29(50):505402.10.1088/1361-6528/aae5b6 ↗
4. MOKSHIN P V, JUNEJA S, PAVELYEV V S. Synthesis of silicon nanowires using plasma chemical etching process for solar cell applications. Journal of Physics: Conference Series, 2019,1368(2):022060.10.1088/1742-6596/1368/2/022060 ↗
5. CHEN W H, CABARROCAS P R I. Rational design of nanowire solar cells: from single nanowire to nanowire arrays. Nanotechnology, 2019,30(19):194002.10.1088/1361-6528/aaff8d ↗
6. KUMAR V, SAXENA S K, KAUSHIK V, et al. Silicon nanowires prepared by metal induced etching (MIE): good field emitters. RSC Advances, 2014,4(101):57799-57803.10.1039/C4RA11093E ↗
7. ADAM T, HASHIM U. Silicon nanowire fabrication: silicon trimming via shallow anisotropic etching. Microelectronics International, 2014,31(2):78-85.10.1108/MI-10-2013-0055 ↗
8. ACHARYA S, KOTTANTHARAYIL A. Poole-Frenkel transport in gold catalyzed VLS grown silicon nanowires. IEEE Transactions on Electron Devices, 2018,65(5):1685-1691.10.1109/TED.2018.2817544 ↗
9. LESTER U VINZONS, LEI SHU, SENPO YIP, et al. Unraveling the morphological evolution and etching kinetics of porous silicon nanowires during metal-assisted chemical etching. Nanoscale Research Letters, 2017,12:385.10.1186/s11671-017-2156-z ↗
10. CONG L T, NGOC LAM N T, GIANG N T, et al. N-type silicon nanowires prepared by silver metal-assisted chemical etching: fabrication and optical properties. Materials Science in Semiconductor Processing, 2019,90:198-204.10.1016/j.mssp.2018.10.026 ↗
11. VIRIDIANA ACA-LÓPEZ, ENRIQUE QUIROGA-GONZÁLEZ, ESTELA GÓMEZ-BAROJAS, et al. Effects of the doping level in the production of silicon nanowalls by metal assisted chemical etching. Materials Science in Semiconductor Processing, 2020,118:105206.10.1016/j.mssp.2020.105206 ↗
12. ZHU Y F, ZHOU L, PAN C J, et al. Fabrication of silicon nanorod arrays via a facile metal-assisted chemical etching method. Journal of Materials Science Materials in Electronics, 2016,27(6):5833-5838.10.1007/s10854-016-4499-0 ↗
13. HUNG Y J, LEE S L. Manipulating the antireflective properties of vertically-aligned silicon nanowires. Solar Energy Materials & Solar Cells, 2014,130:573-581.10.1016/j.solmat.2014.08.004 ↗
14. LI L, FANG Y, XU C, et al. Fabricating vertically aligned sub-20 nm Si nanowire arrays by chemical etching and thermal oxidation. Nanotechnology, 2016,27(16):165303.10.1088/0957-4484/27/16/165303 ↗
15. HE LI, WANG WEN-JIANG, ZHANG XIAO-NING. Improvement of electron emission characteristics of porous silicon emitter by using cathode reduction and electrochemical oxidation. Applied Surface Science, 2017,399:592-598.10.1016/j.apsusc.2016.12.134 ↗
16. KOMODA T, SHENG X, KOSHIDA N. Mechanism of efficient and stable surface-emitting cold cathode based on porous polycrystalline silicon films. Journal of Vacuum Science & Technology B, 1999,17(3):1076-1079.10.1116/1.590696 ↗
17. FENG W, ARAKI H, OZAKI M, et al. Field emission properties of the nonaligned multiwalled carbon nanotube films with different length. Japanese Journal of Applied Physics, 2005,44(1-7):L253-L255.10.1143/JJAP.44.L253 ↗
18. ZHU K, VINZANT T B, NEALE N R, et al. Removing structural disorder from oriented TiO2 nanotube arrays: reducing the dimensionality of transport and recombination in dye-sensitized solar cells. Nano Letters, 2007,7(12):3739.10.1021/nl072145a ↗
19. HAN H, HUANG Z, LEE W. Metal-assisted chemical etching of silicon and nanotechnology applications. Nano Today, 2014,9(3):271-304.10.1016/j.nantod.2014.04.013 ↗
20. ABDULKADIR A, AZIZ A, PAKHURUDDIN M Z. Effects of silver nanoparticles layer thickness towards properties of black silicon fabricated by metal-assisted chemical etching for photovoltaics. SN Applied Sciences, 2020,2(4):515.10.1007/s42452-020-2307-1 ↗
21. ALHER M A, MOSLEH A, BANIHASHEMIAN S F. Investigation of silicon nanowires produced by metal-assisted chemical etching method. IOP Conference Series: Materials Science and Engineering, 2020,671(1):012028.10.1088/1757-899X/671/1/012028 ↗
22. CULLIS A G, CANHAM L T, CALCOTT P J. The structural and luminescence properties of porous silicon. Journal of Applied Physics, 1997,82(3):909-965.10.1063/1.366536 ↗
23. FOWLER R H, NORDHEIM L. Electron emission in intense electric fields. Proceedings of the Royal Society of London, 1928,119(781):173-181.10.1098/rspa.1928.0091 ↗