Thermal Modulation Behavior inside the Hysteresis Loop of W-Mo Co-doping Vanadium Dioxide Film

V1-x-yMoxWyO2 polycrystalline films were deposited on Si (100) substrate by an aqueous Sol-Gel method. XRD, SEM were used to detect the morphology and crystal structure of the films. In situ FTIR was carried out to ana- lyze phase transition properties of the V1-x-yMoxWyO2 films. The results show that the prepared films are (011) oriented on Si substrate at room temperature, W 6+ and Mo 6+ substitute the position of V 4+ in the sublattice. The infrared trans- mittance hysteresis cycles prove that, with the increasing of the W-Mo co-doping content, the phase transition tem- perature becomes low, while the temperature width of the hysteresis and the sharpness of the phase transition decrease, but the temperature width of the phase transition duration becomes wide. In the temperature range of the phase transi- tion duration the infrared transmittance is modulated by the temperature path, and the infrared transmittance cycles are confined to the boundary of the infrared transmittance hysteresis cycles.