Chemical Vapor Deposition of Vanadium Dioxide for Thermochromic Smart Window Applications
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Abstract
3(1. 西湖大学 先进微纳加工与测试平台, 杭州 310024; 2. 浙江省 3D 微纳加工和表征研究重点实验室, 杭州 310024; 3.
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OpenAlex topics: Transition Metal Oxide Nanomaterials
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References (100+)
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1. BERARDI U. A cross-country comparison of the building energy consumptions and their trends. Resources, Conservation and Recycling, 2017, 123: 230.10.1016/j.resconrec.2016.03.014 ↗
2. DEFOREST N, SHEHABI A, SELKOWITZ S, et al. A comparative energy analysis of three electrochromic glazing technologies in commercial and residential buildings. Applied Energy, 2017, 192: 95.10.1016/j.apenergy.2017.02.007 ↗
3. KE Y, ZHOU C, ZHOU Y, et al. Emerging thermal-responsive materials and integrated techniques targeting the energy-efficient smart window application. Advanced Functional Materials, 2018, 28(22): 1800113.10.1002/adfm.201800113 ↗
4. SVENSSON J S E M, GRANQVIST C G. Electrochromic coatings for “smart windows”. Solar Energy Materials, 1985, 12(6): 391.10.1016/0165-1633(85)90033-4 ↗
5. WANG Y, RUNNERSTROM E L, MILLIRON D J. Switchable materials for smart windows. Annual Review of Chemical and Biomolecular Engineering, 2016, 7(1): 283.10.1146/annurev-chembioeng-080615-034647 ↗
6. KE Y, CHEN J, LIN G, et al. Smart windows: electro-, thermo-, mechano-, photochromics, and beyond. Advanced Energy Materials, 2019, 9(39): 1902066.10.1002/aenm.201902066 ↗
7. WARWICK M E A, BINIONS R. Advances in thermochromic vanadium dioxide films. Journal of Materials Chemistry A, 2014, 2(10): 3275.10.1039/C3TA14124A ↗
8. CUI Y, KE Y, LIU C, et al. Thermochromic VO2 for energy-efficient smart windows. Joule, 2018, 2(9): 1707.10.1016/j.joule.2018.06.018 ↗
9. MATAMURA Y, IKENOUE T, MIYAKE M, et al. Mist CVD of vanadium dioxide thin films with excellent thermochromic properties using a water-based precursor solution. Solar Energy Materials and Solar Cells, 2021, 230: 111287.10.1016/j.solmat.2021.111287 ↗
10. SJOBERG S G. Nils Gabriel Sefstrom and the discovery of vanadium. Journal of Chemical Education, 1951, 28(6): 294.10.1021/ed028p294 ↗
11. MORIN F J. Oxides which show a metal-to-insulator transition at the neel temperature. Physical Review Letters, 1959, 3(1): 34.10.1103/PhysRevLett.3.34 ↗
12. GOODENOUGH J B. The two components of the crystallographic transition in VO2. Journal of Solid State Chemistry, 1971, 3(4): 490.10.1016/0022-4596(71)90091-0 ↗
13. WHITTAKER L, PATRIDGE C J, BANERJEE S. Microscopic and nanoscale perspective of the metal-insulator phase transitions of VO2: some new twists to an old tale. The Journal of Physical Chemistry Letters, 2011, 2(7): 745.10.1021/jz101640n ↗
14. AETUKURI N B, GRAY A X, DROUARD M, et al. Control of the metal-insulator transition in vanadium dioxide by modifying orbital occupancy. Nature Physics, 2013, 9(10): 661.10.1038/nphys2733 ↗
15. BABULANAM S M, ERIKSSON T S, NIKLASSON G A, et al. Thermochromic VO2 films for energy-efficient windows. Solar Energy Materials, 1987, 16(5): 347.10.1016/0165-1633(87)90029-3 ↗
16. BARIMAH E K, BOONTAN A, STEENSON D P, et al. Infrared optical properties modulation of VO2 thin film fabricated by ultrafast pulsed laser deposition for thermochromic smart window applications. Scientific Reports, 2022, 12: 11421.10.1038/s41598-022-15439-5 ↗
17. CHANG T, CAO X, DEDON L R, et al. Optical design and stability study for ultrahigh-performance and long-lived vanadium dioxide-based thermochromic coatings. Nano Energy, 2018, 44: 256.10.1016/j.nanoen.2017.11.061 ↗
18. LIU K, LEE S, YANG S, et al. Recent progresses on physics and applications of vanadium dioxide. Materials Today, 2018, 21(8): 875.10.1016/j.mattod.2018.03.029 ↗
19. CHEN S, WANG Z, REN H, et al. Gate-controlled VO2 phase transition for high-performance smart windows. Science Advances, 2019, 5(3): 6815.10.1126/sciadv.aav6815 ↗
20. VU T D, CHEN Z, ZENG X, et al. Physical vapour deposition of vanadium dioxide for thermochromic smart window applications. Journal of Materials Chemistry C, 2019, 7(8): 2121.10.1039/C8TC05014G ↗
21. YAO L, QU Z, PANG Z, et al. Three-layered hollow nanospheres based coatings with ultrahigh-performance of energy-saving, antireflection, and self-cleaning for smart windows. Small, 2018, 14(34): 1801661.10.1002/smll.201801661 ↗
22. ABURAS M, SOEBARTO V, WILLIAMSON T, et al. Thermochromic smart window technologies for building application: a review. Applied Energy, 2019, 255: 113522.10.1016/j.apenergy.2019.113522 ↗
23. KE Y, YIN Y, ZHANG Q, et al. Adaptive thermochromic windows from active plasmonic elastomers. Joule, 2019, 3(3): 858.10.1016/j.joule.2018.12.024 ↗
24. CAO X, CHANG T, SHAO Z, et al. Challenges and opportunities toward real application of VO2-based smart glazing. Matter, 2020, 2(4): 862.10.1016/j.matt.2020.02.009 ↗
25. ZENG W, CHEN N, XIE W. Research progress on the preparation methods for VO2 nanoparticles and their application in smart windows. CrystEngComm, 2020, 22(5): 851.10.1039/C9CE01655D ↗
26. CHEN Z, TANG Y, JI A, et al. Large-scale preparation of durable VO2 nanocomposite coatings. ACS Applied Nano Materials, 2021, 4(4): 4048.10.1021/acsanm.1c00387 ↗
27. WANG S, JIANG T, MENG Y, et al. Scalable thermochromic smart windows with passive radiative cooling regulation. Science, 2021, 374(6574): 1501.10.1126/science.abg0291 ↗
28. CAO C, HU B, TU G, et al. Sputtering flexible VO2 films for effective thermal modulation. ACS Applied Materials & Interfaces, 2022, 14(24): 28105.10.1021/acsami.2c05482 ↗
29. SUN K, WHEELER C, HILLIER J A, et al. Room temperature phase transition of W-doped VO2 by atomic layer deposition on 200 mm Si wafers and flexible substrates. Advanced Optical Materials, 2022, 10(23): 2201326.10.1002/adom.202201326 ↗
30. VU T D, XIE H, WANG S, et al. Durable vanadium dioxide with 33-year service life for smart windows applications. Materials Today Energy, 2022, 26: 100978.10.1016/j.mtener.2022.100978 ↗
31. TANG K, DONG K, LI J, et al. Temperature-adaptive radiative coating for all-season household thermal regulation. 2021, 374(6574): 1504.10.1126/science.abf7136 ↗
32. SHEN N, CHEN S, HUANG R, et al. Vanadium dioxide for thermochromic smart windows in ambient conditions. Materials Today Energy, 2021, 21: 100827.10.1016/j.mtener.2021.100827 ↗
33. KIM J, PAIK T. Recent advances in fabrication of flexible, thermochromic vanadium dioxide films for smart windows. Nanomaterials (Basel), 2021, 11(10): 2674.10.3390/nano11102674 ↗
34. LI X, CAO C, LIU C, et al. Self-rolling of vanadium dioxide nanomembranes for enhanced multi-level solar modulation. Nature Communications, 2022, 13: 7819.10.1038/s41467-022-35513-w ↗
35. LI S Y, NIKLASSON G A, GRANQVIST C G. Thermochromic fenestration with VO2-based materials: three challenges and how they can be met. Thin Solid Films, 2012, 520(10): 3823.10.1016/j.tsf.2011.10.053 ↗
36. WANG S, OWUSU K A, MAI L, et al. Vanadium dioxide for energy conservation and energy storage applications: synthesis and performance improvement. Applied Energy, 2018, 211: 200.10.1016/j.apenergy.2017.11.039 ↗
37. SHAO Z, CAO X, LUO H, et al. Recent progress in the phase-transition mechanism and modulation of vanadium dioxide materials. NPG Asia Materials, 2018, 10(7): 581.10.1038/s41427-018-0061-2 ↗
38. HU P, HU P, VU T D, et al. Vanadium oxide: phase diagrams, structures, synthesis, and applications. Chemical Reviews, 2023, 123(8): 4353.10.1021/acs.chemrev.2c00546 ↗
39. KOSUGE K. The phase diagram and phase transition of the V2O3-V2O5 system. Journal of Physics and Chemistry of Solids, 1967, 28(8): 1613.10.1016/0022-3697(67)90293-4 ↗
40. WRIEDT H A. The O-V (oxygen-vanadium) system. Bulletin of Alloy Phase Diagrams, 1989, 10(3): 271.10.1007/BF02877512 ↗
41. CHOI Y, JUNG Y, KIM H. Low-temperature deposition of thermochromic VO2 thin films on glass substrates. Thin Solid Films, 2016, 615: 437.10.1016/j.tsf.2016.07.051 ↗
42. ZHANG D P, ZHU M D, LIU Y, et al. High performance VO2 thin films growth by DC magnetron sputtering at low temperature for smart energy efficient window application. Journal of Alloys and Compounds, 2016, 659: 198.10.1016/j.jallcom.2015.11.047 ↗
43. AIJAZ A, JI Y X, MONTERO J, et al. Low-temperature synthesis of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering. Solar Energy Materials and Solar Cells, 2016, 149: 137.10.1016/j.solmat.2016.01.009 ↗
44. TAHA M, WALIA S, AHMED T, et al. Insulator-metal transition in substrate-independent VO2 thin film for phase-change devices. Scientific Reports, 2017, 7: 17899.10.1038/s41598-017-17937-3 ↗
45. VU T D, LIU S, ZENG X, et al. High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications. Ceramics International, 2020, 46(6): 8145.10.1016/j.ceramint.2019.12.042 ↗
46. ZHU M, WANG H, WANG B, et al. New route for modification of thermochromic properties of vanadium dioxide films via high-energy X-ray irradiation. Ceramics International, 2019, 45(2, Part A): 1661.10.1016/j.ceramint.2018.10.043 ↗
47. LIU B, GONG M, ZHANG J, et al. Comparative study of the metal insulator transition of a VO2 film with simultaneous infrared thermography and electric measurements. AIP Advances, 2021, 11(3): 035026.10.1063/5.0036756 ↗
48. CASE F C. Low temperature deposition of VO2 thin films. Journal of Vacuum Science & Technology A, 1990, 8(3): 1395.10.1116/1.576888 ↗
49. LEE M H, KIM M G. RTA and stoichiometry effect on the thermochromism of VO2 thin films. Thin Solid Films, 1996, 286(1): 219.10.1016/S0040-6090(96)08536-7 ↗
50. THéRY V, BOULLE A, CRUNTEANU A, et al. Structural and electrical properties of large area epitaxial VO2 films grown by electron beam evaporation. Journal of Applied Physics, 2017, 121(5): 055303.10.1063/1.4975117 ↗
51. MANOUSOU D K, GARDELIS S, CALAMIOTOU M, et al. VO2 thin films fabricated by reduction of thermal evaporated V2O5 under N2 flow. Materials Letters, 2021, 299: 130086.10.1016/j.matlet.2021.130086 ↗
52. GUO X, TAN Y, HU Y, et al. High quality VO2 thin films synthesized from V2O5 powder for sensitive near-infrared detection. Scientific Reports, 2021, 11: 21749.10.1038/s41598-021-01025-8 ↗
53. PóSA L, MOLNÁR G, KALAS B, et al. A rational fabrication method for low switching-temperature VO2. Nanomaterials (Basel), 2021, 11(1): 212.10.3390/nano11010212 ↗
54. KIM D H, KWOK H S. Pulsed laser deposition of VO2 thin films. Applied Physics Letters, 1994, 65(25): 3188.10.1063/1.112476 ↗
55. ZHU P R, YAMAMOTO S, MIYASHITA A, et al. Pulsed laser deposition of VO2 single crystal thin films on sapphire substrates. Chinese Physics Letters, 1998, 15(12): 904.10.1088/0256-307X/15/12/016 ↗
56. LIU H, VASQUEZ O, SANTIAGO V R, et al. Novel pulsed-laser-deposition—VO2 thin films for ultrafast applications. Journal of Electronic Materials, 2005, 34(5): 491.10.1007/s11664-005-0056-y ↗
57. FU D, LIU K, TAO T, et al. Comprehensive study of the metal-insulator transition in pulsed laser deposited epitaxial VO2 thin films. Journal of Applied Physics, 2013, 113(4): 043707.10.1063/1.4788804 ↗
58. MATHEVULA L, NGOM B D, KOTSEDI L, et al. Thermochromic VO2 on zinnwaldite mica by pulsed laser deposition. Applied Surface Science, 2014, 314: 476.10.1016/j.apsusc.2014.07.035 ↗
59. KUMI-BARIMAH E, ANAGNOSTOU D E, JOSE G. Phase changeable vanadium dioxide (VO2) thin films grown from vanadium pentoxide (V2O5) using femtosecond pulsed laser deposition. AIP Advances, 2020, 10(6): 065225.10.1063/5.0010157 ↗
60. BUKHARI S A, KUMAR S, KUMAR P, et al. The effect of oxygen flow rate on metal-insulator transition (MIT) characteristics of vanadium dioxide (VO2) thin films by pulsed laser deposition (PLD). Applied Surface Science, 2020, 529: 146995.10.1016/j.apsusc.2020.146995 ↗
61. YIN D, XU N, ZHANG J, et al. High quality vanadium dioxide films prepared by an inorganic Sol-Gel method. Materials Research Bulletin, 1996, 31(3): 335.10.1016/0025-5408(95)00191-3 ↗
62. LU S, HOU L, GAN F. Structure and optical property changes of sol-gel derived VO2 thin films. Advanced Materials, 1997, 9(3): 244.10.1002/adma.19970090313 ↗
63. LU S, HOU L, GAN F. Surface analysis and phase transition of gel-derived VO2 thin films. Thin Solid Films, 1999, 353(1): 40.10.1016/S0040-6090(99)00428-9 ↗
64. YAN J, HUANG W, ZHANG Y, et al. Characterization of preferred orientated vanadium dioxide film on muscovite (001) substrate. Physica Status Solidi (a), 2008, 205(10): 2409.10.1002/pssa.200779402 ↗
65. LIU D, CHENG H, ZHENG W, et al. Infrared thermochromic properties of VO2 thin films prepared through aqueous Sol-Gel process. Journal of Wuhan University of Technology-Mater. Sci. Ed., 2012, 27(5): 861.10.1007/s11595-012-0563-7 ↗
66. WU Y F, FAN L L, CHEN S M, et al. Spectroscopic analysis of phase constitution of high quality VO2 thin film prepared by facile Sol-Gel method. AIP Advances, 2013, 3(4): 042132.10.1063/1.4802981 ↗
67. KANG L, GAO Y, LUO H. A novel solution process for the synthesis of VO2 thin films with excellent thermochromic properties. ACS Applied Materials & Interfaces, 2009, 1(10): 2211.10.1021/am900375k ↗
68. KANG L, GAO Y, LUO H, et al. Nanoporous thermochromic VO2 films with low optical constants, enhanced luminous transmittance and thermochromic properties. ACS Applied Materials & Interfaces, 2011, 3(2): 135.10.1021/am1011172 ↗
69. YUE F, HUANG W, SHI Q, et al. Phase transition properties of vanadium oxide films deposited by polymer-assisted deposition. Journal of Sol-Gel Science and Technology, 2014, 72(3): 565.10.1007/s10971-014-3474-6 ↗
70. BRECKENFELD E, KIM H, GORZKOWSKI E P, et al. Laser-processing of VO2 thin films synthesized by polymer-assisted-deposition. Applied Surface Science, 2017, 397: 152.10.1016/j.apsusc.2016.11.113 ↗
71. DEVTHADE V, LEE S. Synthesis of vanadium dioxide thin films and nanostructures. Journal of Applied Physics, 2020, 128(23): 231101.10.1063/5.0027690 ↗
72. SUN L, YUAN G, GAO L, et al. Chemical vapour deposition. Nature Reviews Methods Primers, 2021, 1(1): 5.10.1038/s43586-020-00005-y ↗
73. WARWICK M E A, BINIONS R. Chemical vapour deposition of thermochromic vanadium dioxide thin films for energy efficient glazing. Journal of Solid State Chemistry, 2014, 214: 53.10.1016/j.jssc.2013.10.040 ↗
74. DROSOS C, VERNARDOU D. Perspectives of energy materials grown by APCVD. Solar Energy Materials and Solar Cells, 2015, 140: 1.10.1016/j.solmat.2015.03.019 ↗
75. MARUYAMA T, IKUTA Y. Vanadium dioxide thin films prepared by chemical vapour deposition from vanadium(III) acetylacetonate. Journal of Materials Science, 1993, 28(18): 5073.10.1007/BF00361182 ↗
76. LIM B S, RAHTU A, PARK J S, et al. Synthesis and characterization of volatile, thermally stable, reactive transition metal amidinates. Inorganic Chemistry, 2003, 42(24): 7951.10.1021/ic0345424 ↗
77. PRASADAM V P, BAHLAWANE N, MATTELAER F, et al. Atomic layer deposition of vanadium oxides: process and application review. Materials Today Chemistry, 2019, 12: 396.10.1016/j.mtchem.2019.03.004 ↗
78. WEIMER M S, KIM I S, GUO P, et al. Oxidation state discrimination in the atomic layer deposition of vanadium oxides. Chemistry of Materials, 2017, 29(15): 6238.10.1021/acs.chemmater.7b01130 ↗
79. PRASADAM V P, DEY B, BULOU S, et al. Study of VO2 thin film synthesis by atomic layer deposition. Materials Today Chemistry, 2019, 12: 332.10.1016/j.mtchem.2019.03.005 ↗
80. NIANG K M, BAI G, ROBERTSON J. Influence of precursor dose and residence time on the growth rate and uniformity of vanadium dioxide thin films by atomic layer deposition. Journal of Vacuum Science & Technology A, 2020, 38(4): 042401.10.1116/6.0000152 ↗
81. BAI G, NIANG K M, ROBERTSON J. Preparation of atomic layer deposited vanadium dioxide thin films using tetrakis (ethylmethylamino) vanadium as precursor. Journal of Vacuum Science & Technology A, 2020, 38(5): 052402.10.1116/6.0000353 ↗
82. THOMAS T, BLACKMAN C S, PARKIN I P, et al. Atmospheric pressure chemical vapour deposition of vanadium arsenide thin films via the reaction of VCl4 or VOCl3 with tBuAsH2. Thin Solid Films, 2013, 537: 171.10.1016/j.tsf.2013.04.144 ↗
83. MALKEROVA I P, MAKAREVICH A M, ALIKHANYAN A S, et al. Volatility and thermal stability of vanadyl β-diketonate complexes. Russian Journal of Inorganic Chemistry, 2017, 62(6): 818.10.1134/S0036023617060134 ↗
84. KANAI H, YOSHIKAWA T, SONE T, et al. Preparation and characterization of highly dispersed V2O5/SiO2 prepared by a CVD method. Reaction Kinetics and Catalysis Letters, 2002, 75(2): 213.10.1023/A:1015282409268 ↗
85. BADOT J C. Atomic layer epitaxy of vanadium oxide thin films and electrochemical behavior in presence of lithium ions. Electrochemical and Solid-State Letters, 1999, 3(10): 485.10.1149/1.1391187 ↗
86. MANNING T D, PARKIN I P, CLARK R J H, et al. Intelligent window coatings: atmospheric pressure chemical vapour deposition of vanadium oxides. Journal of Materials Chemistry, 2002, 12(10): 2936.10.1039/b205427m ↗
87. DROSOS C, VERNARDOU D. Advancements, challenges and prospects of chemical vapour pressure at atmospheric pressure on vanadium dioxide structures. Materials, 2018, 11(3): 384.10.3390/ma11030384 ↗
88. FIELD M N, PARKIN I P. Atmospheric pressure chemical vapour deposition of vanadium(V) oxide films on glass substrates from reactions of VOCl3 and VCl4 with water. Journal of Materials Chemistry, 2000, 10(8): 1863.10.1039/b002132f ↗
89. MANNING T D, PARKIN I P. Vanadium(IV) oxide thin films on glass and silicon from the atmospheric pressure chemical vapour deposition reaction of VOCl3 and water. Polyhedron, 2004, 23(18): 3087.10.1016/j.poly.2004.09.020 ↗
90. VERNARDOU D, PATERAKIS P, DROSOS H, et al. A study of the electrochemical performance of vanadium oxide thin films grown by atmospheric pressure chemical vapour deposition. Solar Energy Materials and Solar Cells, 2011, 95(10): 2842.10.1016/j.solmat.2011.05.046 ↗
91. MALARDE D, POWELL M J, QUESADA-CABRERA R, et al. Optimized atmospheric-pressure chemical vapor deposition thermochromic VO2 thin films for intelligent window applications. ACS Omega, 2017, 2(3): 1040.10.1021/acsomega.7b00042 ↗
92. GASKELL J M, AFZAAL M, SHEEL D W, et al. Optimised atmospheric pressure CVD of monoclinic VO2 thin films with picosecond phase transition. Surface and Coatings Technology, 2016, 287: 160.10.1016/j.surfcoat.2015.12.090 ↗
93. VERNARDOU D, PEMBLE M E, SHEEL D W. The growth of thermochromic VO2 films on glass by atmospheric-pressure CVD: a comparative study of precursors, CVD methodology, and substrates. Chemical Vapor Deposition, 2006, 12(5): 263.10.1002/cvde.200506419 ↗
94. VERNARDOU D, LOULOUDAKIS D, SPANAKIS E, et al. Thermochromic amorphous VO2 coatings grown by APCVD using a single-precursor. Solar Energy Materials and Solar Cells, 2014, 128: 36.10.1016/j.solmat.2014.04.033 ↗
95. VERNARDOU D, PEMBLE M E, SHEEL D W. In-situ Fourier transform infrared spectroscopy gas phase studies of vanadium (IV) oxide coating by atmospheric pressure chemical vapour deposition using vanadyl (IV) acetylacetonate. Thin Solid Films, 2008, 516(14): 4502.10.1016/j.tsf.2007.06.026 ↗
96. VERNARDOU D, BEI A, LOULOUDAKIS D, et al. Oxygen source-oriented control of atmospheric pressure chemical vapor deposition of VO2 for capacitive applications. Journal of Electrochemical Science and Engineering, 2016, 6(2): 165.
97. WARWICK M E A, RIDLEY I, BINIONS R. Thermochromic vanadium dioxide thin films prepared by electric field assisted atmospheric pressure chemical vapour deposition for intelligent glazing application and their energy demand reduction properties. Solar Energy Materials and Solar Cells, 2016, 157: 686.10.1016/j.solmat.2016.07.031 ↗
98. MATHUR S, RUEGAMER T, GROBELSEK I. Phase-selective CVD of vanadium oxide nanostructures. Chemical Vapor Deposition, 2007, 13(1): 42.10.1002/cvde.200606578 ↗
99. PAPADIMITROPOULOS G, KOSTIS I, TRANTALIDIS S, et al. Investigation of structural, morphological and electrical properties of APCVD vanadium oxide thin films. Physica Status Solidi C, 2015, 12(7): 964.10.1002/pssc.201510029 ↗
100. JIAMPRASERTBOON A, POWELL M J, DIXON S C, et al. Photocatalytic and electrically conductive transparent Cl-doped ZnO thin films via aerosol-assisted chemical vapour deposition. Journal of Materials Chemistry A, 2018, 6(26): 12682.10.1039/C8TA01420E ↗