journal article·2019Open access

Ag Doped Amorphous Carbon Films: Structure, Mechanical and Electrical Behaviors

Ren-De CHEN, Peng GUO, Xiao ZUO, Shi-Peng XU, Pei-Ling KE, Ai-Ying WANG

Journal of Inorganic Materials· Volume 34· Issue 4

Abstract

By adjusting sputter current from 1.3 A to 2.0 A in reactive magnetron sputtering deposition processes, Ag doped amorphous carbon films (a-C:Ag) with doping content from 0.7at% to 41.4at% were prepared. The influence of Ag content on structure, component, mechanical and electrical properties of a-C:Ag films were systematically studied.
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Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Lubricants and Their Additives · Tribology and Wear Analysis

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