Boron Content on Microstructure and Mechanical Properties of Amorphous Boron Carbide by Chemical Vapor Deposition

Boron carbide coatings B x C 1-x (x=0.05, 0.10, 0.16, 0.30, 0.50) were prepared by low pressure chemical vapor deposition technique from BCl 3 -C 3 H 6 -H 2 precursor mixtures. The effects of boron content on the microstructure and mechanical behaviors of the B x C 1-x were investigated. The B 0.1 C 0.9 coating displayed a graphite-like structure of high crystallinity where a large fraction of boron atoms exists as atomic substituent in the carbon layers. As boron