DataVXJournal of Inorganic MaterialsPaper
journal article·2018Open access

Environmental Stable SiO2 Antireflective Coating Modified via NH3/HTMS Vapor Phase Treatment

ZHAO Hui-Yue, WANG Xiao-Dong, FENG Jian-Bin, LIU Yuan, HUANG Ji-Chen, SHEN Jun

Journal of Inorganic Materials· Volume 33· Issue 11
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OpenAlex topics: Silicone and Siloxane Chemistry · Surface Modification and Superhydrophobicity · Metal and Thin Film Mechanics

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