Displacement Characterization of the PZT-based Monolithic Multilayer Piezoelectric Actuators

The PZT-based monolithic multilayer piezoelectric actuator (35 layers of piezo-ceramic, one layer 47μm thick) was fabricated by the tape-casting and the ceramic/internal-electrode cofiring method. The actuator shows large displacement under a low voltage (about 1μm displacement under 38V voltage). The static and dynamic displacement characterizations of the PZT-based actuator was discussed on the basis of its lattice structure and domain behaviors.