Active vibration isolation with a MEMS device. Effects of nonlinearities on control efficiency

This paper investigates piezoelectric and geometrical nonlinear effects on an active vibration isolation MEMS device. The objective is to study the impact of these nonlinearities on the vibration control efficiency. By confirming the importance of an accurate modeling of the microstructure, which is a laminated piezocomposite clamped–clamped beam in our example, we aim to develop high-performance active vibration isolation control. In this paper, the control law is an integral force feedback. The co-location condition is assumed because of the low device dimensions. First, a mathematical modeling is described and implemented into COMSOL Multiphysics software, with the governing equations of the beam taking into account geometric nonlinearities as well as piezoelectric nonlinearities. Then, active vibration control architecture is introduced. The active vibration control of the MEMS device is numerically implemented for different types of nonlinearity. The control performances of the classical linear structure are presented as a reference result. The impact of these nonlinearities on the control efficiency is presented and discussed.