Artificial Neural Network Approach to Model Sidewall Metallization of Silicon-based Bistable Lateral RF MEMS Switch for Redundancy Applications
Source abstract
Abstract
Radio Frequency Micro Electro Mechanical System (RF MEMS) switches are rapidly evolving due to the demand for low cost, high performance, and compact communication systems. An electrothermally actuated bistable lateral MEMS switch for redundancy applications has been already fabricated and tested for mechanical characteristics. In this paper to make this switch as a suitable candidate for RF applications,sidewall metallization using gold is proposed.Modelling of sidewall metallization in Bistable Lateral RF MEMS switch using Cascade Feedforward Scaled Conjugate Gradient (CFSCG) Artificial Neural Network approach is reported. Using an inverse approach of ANN, the desired length of sidewall coating required for better RF performance in terms of return loss and insertion loss is predicted. Time-consuming optimization procedures to determine the sidewall coating in customized EM simulators such as HFSS have been overcome using the proposed CFSCG approach. In this paper, the proposed CFSCG approach reduces the design time of the switch with sidewall coating by 99.4048% compared to the conventional EM simulator which takes approximately 14 h. Validation is done by comparing the obtained results with the HFSS model and good agreement is obtained. The simulation of the proposed switch results in an insertion loss less than -1 dB in the frequency range between 1-10 GHz with gold sidewall metallization of bistable lateral RF MEMS switch.
Source: expertdata · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Advanced MEMS and NEMS Technologies · Photonic and Optical Devices · Acoustic Wave Resonator Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (45)
Show source-provided references
1. Iannacci J (2015) RF-MEMS: an enabling technology for modern wireless systems bearing a market potential still not fully displayed. Microsyst Technol 21(10):2039–2052. https://doi.org/10.1007/s00542-015-2665-610.1007/s00542-015-2665-6 ↗
2. Ma LY, Soin N, Daut MHM, Hatta SFWM (2019) Comprehensive Study on RF-MEMS Switches Used for 5G Scenario. IEEE Access 7:107506–107522. https://doi.org/10.1109/ACCESS.2019.293280010.1109/ACCESS.2019.2932800 ↗
3. Tagliapietra G, Iannacci J (2021) A comprehensive overview of recent developments in RF-MEMS technology-based high-performance passive components for applications in the 5G and future telecommunications scenarios. Facta Univ - Ser Electron Energ 34(3):333–366. https://doi.org/10.2298/fuee2103333t10.2298/fuee2103333t ↗
4. Tian W, Li P, Yuan LX (2018) Research and analysis of MEMS switches in different frequency bands. Micromachines 9(4). https://doi.org/10.3390/mi904018510.3390/mi9040185 ↗
5. Sastry DVK (2009) Radio frequency microelectromechanical systems in defence and aerospace. Def Sci J 59(6):568–579. https://doi.org/10.14429/dsj.59.156110.14429/dsj.59.1561 ↗
6. Dey S, Koul SK, Poddar AK, Rohde U (2020) RF MEMS switches, switching networks and phase shifters for microwave to millimeter wave applications. ISSS J Micro Smart Syst 9(1):33–47. https://doi.org/10.1007/s41683-020-00051-410.1007/s41683-020-00051-4 ↗
7. Muldavin JB, Rebeiz GM (2000) High-isolation CPW MEMS shunt switches-part 1: Modeling. IEEE Trans Microw Theory Tech 48(6):1038–1044. https://doi.org/10.1109/22.90474210.1109/22.904742 ↗
8. Shekhar S, Vinoy KJ, Anandhasuresh G (2018) Low-voltage high-reliability MEMS switch for millimeter wave 5G applications. J Micromech Microeng 28(7):0–3110.1088/1361-6439/aaba3e ↗
9. Kurmendra KR (2021) A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications. Microsyst Technol 27(7):2525–2542. https://doi.org/10.1007/s00542-020-05025-y10.1007/s00542-020-05025-y ↗
10. Yadav D, Murthy NS, Palathingal S, Shekhar S, Giridhar MS, Ananthasuresh GK (2019) A two-terminal bistable electrothermally actuated microswitch. J Microelectromech Syst 28(3):540–549. https://doi.org/10.1109/JMEMS.2019.290499710.1109/JMEMS.2019.2904997 ↗
11. Bakri-Kassem M, Mansour RR (2015) High power latching RF MEMS switches. IEEE Trans Microw Theory Tech 63(1):222–232. https://doi.org/10.1109/TMTT.2014.237693210.1109/TMTT.2014.2376932 ↗
12. Zolfaghari P, Arzhang V, Zolfaghari M (2018) A low loss and power efficient micro-electro-thermally actuated RF MEMS switch for low power and low loss applications. Microsyst Technol 24(7):3019–3032. https://doi.org/10.1007/s00542-017-3684-210.1007/s00542-017-3684-2 ↗
13. He XJ, Lv ZQ, Liu B, Li ZH (2012) High-isolation lateral RF MEMS capacitive switch based on HfO2 dielectric for high frequency applications. Sensors Actuators A Phys 188:342–348. https://doi.org/10.1016/j.sna.2012.03.01310.1016/j.sna.2012.03.013 ↗
14. Zhu YQ, Han L, Tang JY, Huang QA (2013) Design and fabrication of a lateral contact RF-MEMS switch for mm-wave applications. Key Eng Mater 562–565:645–651. https://doi.org/10.4028/www.scientific.net/KEM.562-565.64510.4028/www.scientific.net/KEM.562-565.645 ↗
15. Li X et al (2010) Electro-thermally actuated RF MEMS switch for wireless communication. 2010 IEEE 5th Int. Conf Nano/Micro Eng Mol Syst NEMS 2010:497–500. https://doi.org/10.1109/NEMS.2010.559244310.1109/NEMS.2010.5592443 ↗
16. Daneshmand M, Fouladi S, Mansour RR, Lisi M, Stajcer T (2009) Thermally actuated latching RF MEMS switch and its characteristics. IEEE Trans Microw Theory Tech 57(12):3229–3238. https://doi.org/10.1109/TMTT.2009.203386610.1109/TMTT.2009.2033866 ↗
17. Dellaert D, Doutreloigne J (2015) Compact thermally actuated latching MEMS switch with large contact force. Electron Lett 51(1):80–81. https://doi.org/10.1049/el.2014.323410.1049/el.2014.3234 ↗
18. Liu AQ (2010) RF MEMS switches and switch circuits Design, Fabrication, and Test10.1007/978-0-387-46262-2 ↗
19. Kanthamani S, Raju S, Abhaikumar V (2008) Applications of micro electro mechanical systems in microwave circuits and systems. IETE J Res 54(2):175–187. https://doi.org/10.1080/03772063.2008.1087619710.1080/03772063.2008.10876197 ↗
20. Proctor WC, et al (2010) Design of RF MEMS switches without pull-in instability. c, 7644:76442C. https://doi.org/10.1117/12.848045.10.1117/12.848045 ↗
21. Siddaiah N, Tentu VAS, Rehman MDZ (2019) Design, simulation and performance analysis of novel cantilever Rf-mems switch using serpentine meanders. Int J Eng Adv Technol 8(4):1360–1366
22. Philippine MA, Zareie H, Sigmund O, Rebeiz GM, Kenny TW (2013) Experimental validation of topology optimization for rf mems capacitive switch design. J Microelectromech Syst 22(6):1296–1309. https://doi.org/10.1109/JMEMS.2013.228324110.1109/JMEMS.2013.2283241 ↗
23. Maninder K, Rangra KJ, Kumar D, Singh S (2009) Parametric optimization of symmetric toggle RF MEMS switch for X-band applications. Int J Recent Trends Eng 2(7):95–98
24. Zhang QJ, Gupta KC, Devabhaktuni VK (2003) Artificial neural networks for RF and microwave design - From theory to practice. IEEE Trans Microw Theory Tech 51(4 II):1339–1350. https://doi.org/10.1109/TMTT.2003.80917910.1109/TMTT.2003.809179 ↗
25. Feng Feng WN, Jing Jin Q-J Z, Zhang W (2021) ANNs for Fast Parameterized EM Modeling. IEEE Microw Mag 37–5010.1109/MMM.2021.3095990 ↗
26. Na W, Zhang C, Zhang Q (2015) Parametric modeling of EM behavior using neural networks. Comput Electromagn Outlook 279–293. https://doi.org/10.1007/978-981-287-095-7_1110.1007/978-981-287-095-7_11 ↗
27. Gupta K, Zhang Q (2000) Neural networks for RF and microwave design. In Artech House, pp. 61–103
28. Jin J, Feng F, Zhang QJ (2021) An overview of neural network techniques for microwave inverse modeling. 2021 IEEE Int. Symp. Radio-Frequency Integr. Technol. RFIT 2021.https://doi.org/10.1109/RFIT52905.2021.956530510.1109/RFIT52905.2021.9565305 ↗
29. Chapman CD, Saitou K, Jakiela MJ (1993) Genetic algorithms as an approach to configuration and topology design. Proc ASME Des Eng Tech Conf Part F1679(December 1994):485–498. https://doi.org/10.1115/DETC1993-033810.1115/DETC1993-0338 ↗
30. Shalaby K, Saitou MM (2004) Topology optimization of structural supports for mems switches using discrete simulated annealing. Cairo Univ. Conf. Proceeding MDP-8, pp. 77–84
31. Fasihuddin Q, Scholar ZPD, Rukmini MSS, Mpgisoen SKCD (2019) Performance of GSO algorithm with ANN by using Matlab for RF MEMS Reconfigurable Antenna. 2018 2nd Int. Conf. I-SMAC (IoT Soc. Mobile, Anal. Cloud) (I-SMAC)I-SMAC (IoT Soc. Mobile, Anal. Cloud) (I-SMAC), 2018 2nd Int. Conf., no. 4, pp. 258–261. https://doi.org/10.1109/I-SMAC.2018.865374610.1109/I-SMAC.2018.8653746 ↗
32. Ya ML, Soin N (2014) Design and Optimization of a Low-Voltage Shunt Capacitive RF-MEMS Switch. Symp. Des. Test, Integr. Packag. MEMS/MOEMS, no. April, 201410.1109/DTIP.2014.7056645 ↗
33. Kula S, Lup A (2017) Optimization of RF MEMS capacitive switches in static and dynamic regimes based on reduced models. XXVI Int Conf Information, Commun Autom Technol 1–410.1109/ICAT.2017.8171636 ↗
34. Shahraki H, Zahiri SH (2013) Design and simulation of an RF MEMS switch for removing the self-actuation and latching phenomena using PSO method. Iran J Electr Comput Eng 12(1 & 2):56–62
35. Ćirić T, Marinković Z, Pronić-Rančić O, Marković V, Vietzorreck L (2017) ANN Approach for modeling of mechanical characteristics of RF MEMS capacitive switches - An overview. Microw Rev 23(1):25–34
36. Ćirić T, Dhuri R, Marinković Z, Pronić-Rančić O, Marković V, Vietzorreck L (2018) Neural based lumped element model of capacitive RF MEMS switches. Frequenz 72(11–12):539–546. https://doi.org/10.1515/freq-2018-002310.1515/freq-2018-0023 ↗
37. Marinković Z et al (2016) Artificial neural network based design of RF MEMS capacitive shunt switches. Appl Comput Electromagn Soc J 31(7):756–764
38. Marinkovi Z, Aleksi A, Tomislav Ć, Proni O, Markovi V, Vietzorreck L (2015) Inverse Electro-Mechanical ANN Model of RF MEMS Capacitive Switches - Applicability Evaluation. L Int Sc Conf Information Commun Energy Syst Technol 1:24–26
39. Marinkovic Z, Markovic V, Ciric T, Vietzorreck L, Pronic-Rancic O (2016) Artifical neural networks in RF MEMS switch modelling. Facta Univ - Ser Electron Energ 29(2):177–191. https://doi.org/10.2298/fuee1602177m10.2298/fuee1602177m ↗
40. Chawla P, Khanna R (2012) Design and optimization of RF MEMS switch for reconfigurable antenna using feed-forward back-propagation ANN method. 3rd Nirma Univ. Int Conf Eng NUiCONE 2012:6–8. https://doi.org/10.1109/NUICONE.2012.649324510.1109/NUICONE.2012.6493245 ↗
41. Mafinejad Y, Kouzani A, Mafinezhad K, Hosseinnezhad R (2017) Low insertion loss and high isolation capacitive RF MEMS switch with low pull-in voltage. Int J Adv Manuf Technol 93(1–4):661–670. https://doi.org/10.1007/s00170-017-0558-910.1007/s00170-017-0558-9 ↗
42. Lee Y, Filipovic DS (2005) ANN based electromagnetic models for the design of RF MEMS switches. IEEE Microw Wirel Components Lett 15(11):823–825. https://doi.org/10.1109/LMWC.2005.85900110.1109/LMWC.2005.859001 ↗
43. Lee Y, Filipovic DS (2005) Combined full-wave / ANN based modeling of MEMS switches for. Comput Eng 85–88
44. Suganthi S, Murugesan K, Raghavan S (2012) ANN model of RF MEMS lateral SPDT switches for millimeter wave applications. J Microwaves Optoelectron Electromagn Appl 11(1):130–143. https://doi.org/10.1590/S2179-1074201200010001110.1590/S2179-10742012000100011 ↗
45. Huang HW, Yang YJ (2013) A MEMS bistable device with push-on-push-off capability. J Microelectromech Syst 22(1):7–9. https://doi.org/10.1109/JMEMS.2012.222816510.1109/JMEMS.2012.2228165 ↗