Well Modification of Porous Silicon/WO3 Hybrid Structure by Incorporating A Gold Nanoparticles

Abstract In this paper, we describe the creation and characterization of three distinct hybrid nanostructures that use nanostructures as substrate components: porous silicon (PSi), gold nanoparticles (Au NPs), and WO₃ tungsten oxide NPs. the wafer is an Silicon N-type with an orientation of (100), and it is used to form PSi layers with the assistance of laser beam electrochemical etching process. In this work, the conditions of etching were a 25 minutes the time of etching and a 20 mA cm² the current density .Gold salt (HAuCl₄) was used to create gold nanoparticles through ionic reduction processes, which were then deposited onto the PSi layer. The tri-type hybrid nanostructures were produced by dip-coating the Au NPs/PSi hybrid layer with WO₃NPs. The WO₃ NPs/PSi and WO₃NPs/Au NPs/PSi hybrid nanostructures were described through Fourier transform infrared spectrometry FTIR, the atomic force microscopy AFM, a field-emission scanning electron microscopy,the X-ray diffraction, an energy dispersive X-ray spectroscopy, and photoluminescence spectra. The nanostructure of WO₃ NPs/Au NPs/PSi had a specific surface area (S.S.A) of around 6.23 m²/g. The value of S.S.A for gold nanoparticales Au NPs was around 6.47 m²/g, and that for WO₃ NPs was 8.25 m²/g. The hybrid nanostructure substrates of WO₃ NPs/PSi and WO₃ NPs/Au NPs/PSi had NP surface densities of around 5.5×10⁷ and 3.2×10⁹ NPs/cm², respectively. The produced tri-type hybrid nanostructures are inexpensive, easy to use, and ideal gas-sensing substrates.