Determination of the Orientations and Microstructures of Pb(Zr,Ti)O Films Fabricated on Different Substrate Structures

Piezoelectric (PZT) films with different orientations and microstructures were fabricated on different substrate structures in one chip. To investigate the substrate structural effect of Pb(Zr 0.52 Ti 0.48 ) films, different substrate structures of a Pt membrane and Pt on a Si substrate (called platinized Si) were fabricated after Si back-side etching. The PZT films were fabricated on the prepared substrates by RF magnetron sputtering with a single oxide target. After the annealing of a PZT film, different microstructures and Forientations were observed from different parts of the sample. The PZT film on the Pt membrane has (001) orientation and grains of ~1 m size. On the other hand, the PZT film on platinized Si has (111) orientation and grains of ~3 m size.