Development of a Piezo-driven Mechanical Stage Integrated Microdisplacement Sensor for Calibration of Displacements
Source abstract
Abstract
Key words: displacement sensor
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Semiconductor Lasers and Optical Devices · Photonic and Optical Devices · Advanced MEMS and NEMS Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
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