Machine-learning-assisted growth of high-quality AlN single-crystal thin films via MNVPE based on Bayesian optimization
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: GaN-based semiconductor devices and materials · Machine Learning in Materials Science · Acoustic Wave Resonator Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (22)
Show source-provided references
1. Strite · J. Vac. Sci. Technol. B · 1992 · 10 · 123710.1116/1.585897 ↗
2. Gadenne · Thin Solid Films · 1998 · 333 · 25110.1016/S0040-6090(98)00816-5 ↗
3. Qteish · Phys. Rev. B · 1992 · 45 · 653410.1103/PhysRevB.45.6534 ↗
4. Weitzel · J. Electrochem. Soc. · 1986 · 133 · 40910.1149/1.2108375 ↗
5. Bondokov · MRS Proc. · 2007 · 955 · 308
6. Chemekova · Phys. Status Solidi A · 2011 · 208 · 1612
7. Bickermann · Phys. Status Solidi C · 2012 · 9 · 44910.1002/pssc.201100345 ↗
8. Wu · Sci. Rep. · 2015 · 5 · 1740510.1038/srep17405 ↗
9. Kaganer · Phys. Rev. B · 1999 · 59 · 179510.1103/PhysRevE.59.1795 ↗
10. Agrawal · APL Mater. · 2016 · 410.1063/1.4946894 ↗
11. Rajan · Mater. Today · 2005 · 8 · 3810.1016/S1369-7021(05)71123-8 ↗
12. Seko · Phys. Rev. B · 2014 · 8910.1103/PhysRevB.89.054303 ↗
13. Seko · Phys. Rev. Lett. · 2015 · 11510.1103/PhysRevLett.115.205901 ↗
14. Shahriari · Proc. IEEE · 2016 · 104 · 14810.1109/JPROC.2015.2494218 ↗
15. Bailar · 1973 · 216
16. van Roekeghem · Phys. Rev. X · 2016 · 6
17. Xie · Vacuum · 2023 · 21010.1016/j.vacuum.2023.111809 ↗
18. Li · Cryst. Growth Des. · 2024 · 24 · 279910.1021/acs.cgd.3c01446 ↗
19. Mockus · Towards Global Optim. · 1978 · 2 · 117
20. Jones · J. Glob. Optim. · 1998 · 13 · 45510.1023/A:1008306431147 ↗
21. Wakabayashi · Appl. Phys Express · 2018 · 1110.7567/APEX.11.112401 ↗
22. Snoek · Adv. Neural Inf. Process. Syst. · 2012 · 25 · 2951