Development of Ni-based superalloys for microelectromechanical systems

Electrodeposited LIGA Ni microtensile specimens, representative of microelectromechanical systems components, have been vapor-phase aluminized with a process traditionally used to make diffusion aluminide coatings. Subsequent heat treatments resulted in homogenization of Al throughout the specimens and production of a precipitation-strengthened (γ-Ni + γ′-Ni3Al) microstructure. The thermal stability and strength of these components represent a significant improvement over traditional LIGA Ni materials. Microprobe analysis points to the importance of composition in determining strength and ductility of these materials.