journal article·1996-05

Observations of guinier-preston zones in an as-deposited Al-1wt.%Si-0.5wt.%Cu thin film

Chih-Hang Tung, Re-Long Chiu, Peng-Heng Chang

Scripta Materialia· Volume 34· Issue 9
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Abstract

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Research context

OpenAlex topics: Copper Interconnects and Reliability · Semiconductor materials and devices · Metal and Thin Film Mechanics

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