journal article·2013Open access

Structural characterization of the nickel thin film deposited by glad technique

J. Potocnik, M. Nenadovic, B. Jokic, S. Strbac, Z. Rakocevic

Science of Sintering· Volume 45· Issue 1

Abstract

In this work, a columnar structure of nickel thin film has been obtained using an advanced deposition technique known as Glancing Angle Deposition. Nickel thin film was deposited on glass sample at the constant emission current of 100 mA. Glass sample was positioned 15 degrees with respect to the nickel vapor flux. The obtained nickel thin film was characterized by Force Modulation Atomic Force Microscopy and by Scanning Electron Microscopy. Analysis indicated that the formation of the columnar structure occurred at the film thickness of 1 ?m, which was achieved for the deposition time of 3 hours.
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Research context

OpenAlex topics: Optical Coatings and Gratings · nanoparticles nucleation surface interactions · Copper Interconnects and Reliability

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Affiliations

INS Vinča, Laboratory of Atomic Physics, Belgrade

Faculty of Technology and Metallurgy, Belgrade

ICTM-Institute of Electrochemistry, Belgrade

Funding

Ministry of Education, Science and Technological Development of the Republic of Serbia

References

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