In-situ analysis of laser-induced breakdown spectra for online monitoring of femtosecond laser machining of sapphire
Source abstract
Abstract
Laser-induced breakdown spectroscopy (LIBS) is widely used for elemental analysis. However, its application for monitoring and analyzing a laser machining process by examining the changes in spectral information warrants further investigation. In this study, we investigate the effect of laser parameters on the spectra, variations in the time-resolved plasma emission spectra, and the relationship between the morphology of craters and plasma plume evolution during the femtosecond (fs) laser ablation of sapphire. The Boltzmann plot method and Stark’s broadening model are employed to estimate the temporal temperature and electron density of the plasma plume, revealing the process of plasma evolution. This study aims to demonstrate the feasibility of LIBS for online monitoring of laser processing through experimental data and theoretical explanations.
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Research context
OpenAlex topics: Laser-induced spectroscopy and plasma · Cultural Heritage Materials Analysis · Analytical chemistry methods development
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (39)
Show source-provided references
1. Hahn D W, Omenetto N. Laser-induced breakdown spectroscopy (LIBS), part II: Review of instrumental and methodological approaches to material analysis and applications to different fields. Appl Spectrosc, 2012, 66: 347–41910.1366/11-06574 ↗
2. Tognoni E, Palleschi V, Corsi M, et al. Quantitative micro-analysis by laser-induced breakdown spectroscopy: A review of the experimental approaches. SpectroChim Acta Part B-Atomic Spectr, 2002, 57: 1115–113010.1016/S0584-8547(02)00053-8 ↗
3. Cremers D A, Radziemski L J. Handbook of Laser-induced Breakdown Spectroscopy. Chichester: John Wiley & Sons, 201310.1002/9781118567371 ↗
4. Noll R. Laser-induced Breakdown Spectroscopy. Berlin: Springer, 2012. 7–1510.1007/978-3-642-20668-9_2 ↗
5. Zhou Z, Ge Y, Liu Y. Real-time monitoring of carbon concentration using laser-induced breakdown spectroscopy and machine learning. Opt Express, 2021, 29: 39811–3982310.1364/OE.443732 ↗
6. Hedwig R, Lahna K, Idroes R, et al. Food analysis employing high energy nanosecond laser and low pressure He ambient gas. Micro-Chem J, 2019, 147: 356–364
7. Haider A F M Y, Khan Z H. Determination of Ca content of coral skeleton by analyte additive method using the LIBS technique. Optics Laser Tech, 2012, 44: 1654–165910.1016/j.optlastec.2012.01.032 ↗
8. Li W, Lu J, Dong M, et al. Quantitative analysis of calorific value of coal based on spectral preprocessing by laser-induced breakdown spectroscopy (LIBS). Energy Fuels, 2017, 32: 24–3210.1021/acs.energyfuels.7b01718 ↗
9. Sdvizhenskii P A, Lednev V N, Grishin M Y, et al. Deep ablation and LIBS depth elemental profiling by combining nano- and microsecond laser pulses. SpectroChim Acta Part B-Atomic Spectr, 2021, 177: 10605410.1016/j.sab.2020.106054 ↗
10. Altowyan A S, El-Hussein A, Ahmed H A, et al. Influence of the laser wavelength on the self-absorption of Cu and Ni spectral lines by using LIBS technique. Optical Mater, 2022, 131: 11273110.1016/j.optmat.2022.112731 ↗
11. Jiao J, Guo Z. Analysis of plasma-mediated ablation in aqueous tissue. Appl Surf Sci, 2012, 258: 6266–627110.1016/j.apsusc.2012.03.019 ↗
12. Sun X, Zou Q, Zhou H, et al. LIBS repeatability study based on the pulsed laser ablation volume measuring by the extended depth of field microscopic three-dimensional reconstruction imaging. Optics Lasers Eng, 2022, 153: 10700310.1016/j.optlaseng.2022.107003 ↗
13. Hwang D J, Jeon H, Grigoropoulos C P, et al. Femtosecond laser ablation induced plasma characteristics from submicron craters in thin metal film. Appl Phys Lett, 2007, 91: 25111810.1063/1.2825289 ↗
14. Zorba V, Mao X, Russo R E. Femtosecond laser induced breakdown spectroscopy of Cu at the micron/sub-micron scale. SpectroChim Acta Part B-Atomic Spectr, 2015, 113: 37–4210.1016/j.sab.2015.08.011 ↗
15. Shiby S, Vasa N J. Nanosecond laser-assisted micro-scribing of a copper film on a dielectric material with laser-induced breakdown spectroscopy based monitoring. Optics Laser Tech, 2022, 147: 10768510.1016/j.optlastec.2021.107685 ↗
16. Lednev V N, Sdvizhenskii P A, Stavertiy A Y, et al. Online and in situ laser-induced breakdown spectroscopy for laser welding monitoring. SpectroChim Acta Part B-Atomic Spectr, 2021, 175: 10603210.1016/j.sab.2020.106032 ↗
17. Sheta S, Afgan M S, Jiacen L, et al. Insights into enhanced repeatability of femtosecond laser-induced plasmas. ACS Omega, 2020, 5: 30425–3043510.1021/acsomega.0c03636 ↗
18. Li Q K, Cao J J, Yu Y H, et al. Fabrication of an anti-reflective microstructure on sapphire by femtosecond laser direct writing. Opt Lett, 2017, 42: 543–54610.1364/OL.42.000543 ↗
19. Schaffer C B, Brodeur A, Mazur E. Laser-induced breakdown and damage in bulk transparent materials induced by tightly focused femtosecond laser pulses. Meas Sci Technol, 2001, 12: 1784–179410.1088/0957-0233/12/11/305 ↗
20. Yu J, Ma Q, Motto-Ros V, et al. Generation and expansion of laser-induced plasma as a spectroscopic emission source. Front Phys, 2012, 7: 649–66910.1007/s11467-012-0251-2 ↗
21. Yu X, Zhang Q, Qi D, et al. Femtosecond laser-induced large area of periodic structures on chalcogenide glass via twice laser direct-writing scanning process. Optics Laser Tech, 2020, 124: 10597710.1016/j.optlastec.2019.105977 ↗
22. Xu Z, Xu B, Peng X, et al. Laser-ablation dependence of fiber-laser-based laser-induced breakdown spectroscopy for determining Cu, Mg, and Mn elements in aluminum alloys. J Anal At Spectrom, 2021, 36: 2501–250810.1039/D1JA00188D ↗
23. Shin J. Investigation of the surface morphology in glass scribing with a UV picosecond laser. Optics Laser Tech, 2019, 111: 307–31410.1016/j.optlastec.2018.10.008 ↗
24. Li H, Liu T, Fu Y, et al. Improving the accuracy of high-repetition-rate LIBS based on laser ablation and scanning parameters optimization. Opt Express, 2022, 30: 37470–3748310.1364/OE.470782 ↗
25. Hwang D J, Grigoropoulos C P, Yoo J, et al. Optical near-field ablation-induced plasma characteristics. Appl Phys Lett, 2006, 89: 25410110.1063/1.2422884 ↗
26. Park M, Balkey M M, Mao X, et al. Spatio-temporal ablation dynamics and plasma chemistry of aluminum induced by temporally modulated ytterbium fiber laser. Appl Phys Lett, 2021, 119: 22410310.1063/5.0076527 ↗
27. Harilal S S, Tillack M S, O’Shay B, et al. Confinement and dynamics of laser-produced plasma expanding across a transverse magnetic field. Phys Rev E, 2004, 69: 02641310.1103/PhysRevE.69.026413 ↗
28. Harilal S S, Bindhu C V, Tillack M S, et al. Plume splitting and sharpening in laser-produced aluminium plasma. J Phys D-Appl Phys, 2002, 35: 2935–293810.1088/0022-3727/35/22/307 ↗
29. Farid N, Harilal S S, Ding H, et al. Dynamics of ultrafast laser plasma expansion in the presence of an ambient. Appl Phys Lett, 2013, 103: 19111210.1063/1.4829487 ↗
30. Park M, Jeun J, Han G, et al. Time-resolved emission and scattering imaging of plume dynamics and nanoparticle ejection in femtosecond laser ablation of silver thin films. Appl Phys Lett, 2020, 116: 23410510.1063/5.0009227 ↗
31. Wang Q, Chen A, Liu Y, et al. Comparison of emission signals for femtosecond and nanosecond laser-ablated Cu plasmas by changing the distance from focusing-lens to target-surface at different target temperatures. SpectroChim Acta Part B-Atomic Spectr, 2021, 185: 10630210.1016/j.sab.2021.106302 ↗
32. Zhang S, Wang X, He M, et al. Laser-induced plasma temperature. SpectroChim Acta Part B-Atomic Spectr, 2014, 97: 13–3310.1016/j.sab.2014.04.009 ↗
33. Feng J, Wang Z, Li Z, et al. Study to reduce laser-induced breakdown spectroscopy measurement uncertainty using plasma characteristic parameters. SpectroChim Acta Part B-Atomic Spectr, 2010, 65: 549–55610.1016/j.sab.2010.05.004 ↗
34. Aguilera J A, Aragón C. Multi-element Saha–Boltzmann and Boltzmann plots in laser-induced plasmas. SpectroChim Acta Part B-Atomic Spectr, 2007, 62: 378–38510.1016/j.sab.2007.03.024 ↗
35. Ahmad K, Tawfik W, Farooq W A, et al. Analysis of alumina-based titanium carbide composites by laser-induced breakdown spectroscopy. Appl Phys A, 2014, 117: 1315–132210.1007/s00339-014-8544-7 ↗
36. NIST Atomic Spectra Database. https://www.nist.gov/pml/atomic-spectra-database
37. Sansonetti J E, Martin W C. Handbook of basic atomic spectroscopic data. J Phys Chem Reference Data, 2005, 34: 1559–225910.1063/1.1800011 ↗
38. Kelleher D E, Podobedova L I. Atomic transition probabilities of aluminum. A critical compilation. J Phys Chem Reference Data, 2008, 37: 709–91110.1063/1.2734564 ↗
39. Li Y, Wu R, Dai Q, et al. Spectroscopic study on the time evolution behaviors of the double laser-induced breakdown of Al plasma. Optik, 2017, 147: 32–3810.1016/j.ijleo.2017.08.026 ↗