journal article·2023-03

Design and experiments of a small resonant inchworm piezoelectric robot

Jie Deng, ChengLin Yang, YingXiang Liu, ShiJing Zhang, Jing Li, XueFeng Ma, Hui Xie

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Abstract

A small resonant inchworm piezoelectric robot with six driving feet which are set evenly along the circumference is proposed and tested. A bonded-type structure is adopted to realize a small size. The radial bending vibration mode and longitudinal vibration mode are excited at the same frequency. The superposition of these two vibration modes makes the driving feet produce elliptical motions. And the driving force can be generated by friction coupling between the driving foot and the operating plane The structure of the robot is designed by finite element simulation. The geometric parameters are adjusted to make the resonant frequencies of the vibration modes as close as possible. The elliptical trajectories generated at the driving feet are discussed in detail. The vibration and motion characteristics of the prototype are tested, and the resonant frequencies of the radial bending mode and the longitudinal vibration mode are degenerated successfully. The optimal working frequency of the prototype is 21.5 kHz. The maximum speed of the prototype is 200 mm/s, and the displacement resolution is 0.71 µm. The measured results show that the resonant inchworm piezoelectric robot can be used for fast and high-precision transportation in narrow space.
Source: expertdata · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Piezoelectric Actuators and Control · Advanced MEMS and NEMS Technologies · Soft Robotics and Applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (32)

Show source-provided references
1. Wei Y J, Wu C D. Modeling of nano piezoelectric actuator based on block matching algorithm with optimal block size. Sci China Tech Sci, 2013, 56: 2649–265710.1007/s11431-013-5351-x ↗
2. Deng J, Liu Y X, Zhang S J, et al. Modeling and experiments of a nano-positioning and high frequency scanning piezoelectric platform based on function module actuator. Sci China Tech Sci, 2020, 63: 2541–255210.1007/s11431-020-1676-7 ↗
3. Guo M, Pan S, Hu J, et al. A small linear ultrasonic motor utilizing longitudinal and bending modes of a piezoelectric tube. IEEE Trans Ultrason Ferroelect Freq Contr, 2014, 61: 705–70910.1109/TUFFC.2014.2958 ↗
4. Mashimo T. Micro ultrasonic motor using a cube with a side length of 0.5 mm. IEEE ASME Trans Mechatron, 2016, 21: 1189–119210.1109/TMECH.2015.2511782 ↗
5. Li J, Liu Y, Deng J, et al. Development of a linear piezoelectric microactuator inspired by the hollowing art. IEEE Trans Ind Electron, 2022, 69: 10407–1041610.1109/TIE.2022.3152008 ↗
6. Zhang S J, Liu Y X, Deng J, et al. A novel sensitive piezoelectric mass balance used for weightless environment. Sci China Tech Sci, 2021, 64: 745–75410.1007/s11431-020-1698-9 ↗
7. Deng J, Liu S, Liu Y, et al. A 2-DOF needle insertion device using inertial piezoelectric actuator. IEEE Trans Ind Electron, 2022, 69: 3918–392710.1109/TIE.2021.3073313 ↗
8. Li C X, Ding Y, Gu G Y, et al. Damping control of piezo-actuated nanopositioning stages with recursive delayed position feedback. IEEE ASME Trans Mechatron, 2017, 22: 855–86410.1109/TMECH.2016.2639584 ↗
9. Goldberg B, Zufferey R, Doshi N, et al. Power and control autonomy for high-speed locomotion with an insect-scale legged robot. IEEE Robot Autom Lett, 2018, 3: 987–99310.1109/LRA.2018.2793355 ↗
10. Ozaki T, Hamaguchi K. Bioinspired flapping-wing robot with direct-driven piezoelectric actuation and its takeoff demonstration. IEEE Robot Autom Lett, 2018, 3: 4217–422410.1109/LRA.2018.2863104 ↗
11. Meinhold W, Martinez D E, Oshinski J, et al. A direct drive parallel plane piezoelectric needle positioning robot for MRI guided intraspinal injection. IEEE Trans Biomed Eng, 2021, 68: 807–81410.1109/TBME.2020.3020926 ↗
12. Fu X, Xiao W L, Xu L Y, et al. Piezoelectric inchworm-type probe-approaching stepper. In: Proceedings of 7th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI). Lijiang, 201110.1117/12.903935 ↗
13. Pan C H, Tzou S S, Shiu R Y. A novel wireless and mobile piezoelectric micro robot. In: Proceedings of 2010 IEEE International Conference on Mechatronics and Automation. Xi’an, 201010.1109/ICMA.2010.5588196 ↗
14. Jalili H, Salarieh H, Vossoughi G. Motion type analysis of a piezoelectric-actuated vibratory micro-robot in hybrid stick-slip-jump mode. J Sound Vib, 2018, 436: 81–9410.1016/j.jsv.2018.08.024 ↗
15. Wang G, Li C, Yuan T. Design and experiment of a small-scale walking robot employing stick-slip motion principle. Rev Sci Instrum, 2017, 88: 11500110.1063/1.4991063 ↗
16. Ma X, Liu Y, Liu J, et al. Crabbot: A pole-climbing robot driven by piezoelectric stack. IEEE Trans Robot, 2022, 38: 765–77810.1109/TRO.2021.3102418 ↗
17. McClintock H, Temel F Z, Doshi N, et al. The milliDelta: A high-bandwidth, high-precision, millimeter-scale delta robot. Sci Robot, 2018, 3: eaar301810.1126/scirobotics.aar3018 ↗
18. Suzuki H, Wood R J. Origami-inspired miniature manipulator for teleoperated microsurgery. Nat Mach Intell, 2020, 2: 437–44610.1038/s42256-020-0203-4 ↗
19. Deng J, Liu Y, Zhang S, et al. Development of a nanopositioning platform with large travel range based on bionic quadruped piezoelectric actuator. IEEE ASME Trans Mechatron, 2021, 26: 2059–207010.1109/TMECH.2020.3031258 ↗
20. Deng J, Liu Y, Chen W, et al. A XY transporting and nanopositioning piezoelectric robot operated by leg rowing mechanism. IEEE ASME Trans Mechatron, 2019, 24: 207–21710.1109/TMECH.2019.2890825 ↗
21. Yu H, Liu Y, Deng J, et al. Bioinspired multilegged piezoelectric robot: The design philosophy aiming at high-performance micromanipulation. Adv Intelligent Syst, 2022, 4: 210014210.1002/aisy.202100142 ↗
22. Moon C, Lee S, Chung J K. A new fast inchworm type actuator with the robust I/Q heterodyne interferometer feedback. Mechatronics, 2006, 16: 105–11010.1016/j.mechatronics.2005.10.003 ↗
23. Tenzer P E, Mrad R B. A systematic procedure for the design of piezoelectric inchworm precision positioners. IEEE ASME Trans Mechatron, 2004, 9: 427–43510.1109/TMECH.2004.828627 ↗
24. Liu Y, Chen W, Shi D, et al. Development of a four-feet driving type linear piezoelectric actuator using bolt-clamped transducers. IEEE Access, 2017, 5: 27162–2717110.1109/ACCESS.2017.2774258 ↗
25. Mohammad T, Salisbury S P. Design and assessment of a Z-axis precision positioning stage with centimeter range based on a piezoworm motor. IEEE ASME Trans Mechatron, 2015, 20: 2021–203010.1109/TMECH.2014.2360644 ↗
26. Liu Y, Li J, Deng J, et al. Arthropod-metamerism-inspired resonant piezoelectric millirobot. Adv Intell Syst, 2021, 3: 210001510.1002/aisy.202100015 ↗
27. Zhang Q, Chen W, Liu Y, et al. A frog-shaped linear piezoelectric actuator using first-order longitudinal vibration mode. IEEE Trans Ind Electron, 2017, 64: 2188–219510.1109/TIE.2016.2626242 ↗
28. Niu R, Guo Y. Novel piezoelectric crawling robot with multiple degrees of freedom. AIP Adv, 2021, 11: 07530610.1063/5.0055283 ↗
29. Hariri H, Bernard Y, Razek A. A traveling wave piezoelectric beam robot. Smart Mater Struct, 2014, 23: 02501310.1088/0964-1726/23/2/025013 ↗
30. Hao B, Wang L, Wang R F, et al. A novel rail-type piezoelectric robot for Tokamak maintenance operation. In: Proceedings of 14th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA). Shijiazhuang, 201910.1109/SPAWDA48812.2019.9019236 ↗
31. Zhou J, Suzuki M, Takahashi R, et al. Development of a Δ-type mobile robot driven by three standing-wave-type piezoelectric ultrasonic motors. IEEE Robot Autom Lett, 2020, 5: 6717–672310.1109/LRA.2020.3018031 ↗
32. Tian X, Quan Q, Wang L, et al. An inchworm type piezoelectric actuator working in resonant state. IEEE Access, 2018, 6: 18975–1898310.1109/ACCESS.2018.2814010 ↗