Bionic MEMS for Touching and Hearing Sensations: Recent Progress, Challenges, and Solutions
Source abstract
Abstract
This paper reviews the recent progress on bionic microelectromechanical systems (MEMS) used for touching and hearing sensations, focusing on the following three types of devices: MEMS tactile sensors, MEMS directional microphones, and MEMS vector hydrophones. After reviewing the electromechanical coupling principles, design, and performance of these MEMS devices, the authors conclude that it is vital for future research efforts in bionic MEMS to focus more on microfabrication technologies. The development of robust microfabrication flows is the basis to implement hybrid electromechanical coupling principles based on novel functional materials. High-quality polymeric micromachining technologies can also significantly enhance the potential of existing bionic MEMS designs for more practical applications.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Advanced Sensor and Energy Harvesting Materials · Tactile and Sensory Interactions · Muscle activation and electromyography studies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (100+)
Show source-provided references
1. Chong, P. F., Shi, X. M., & Cheng, C. H. (2014). Capacitive micromachined ultrasonic transducer (CMUT) array with single-layer graphene membrane. Micro and Nano Letters, 9, 884–886.10.1049/mnl.2014.0421 ↗
2. Ge, C., & Cretu, E. (2018). Design and fabrication of SU-8 CMUT arrays through grayscale lithography. Sensors and Actuators, A: Physical, 280, 368–375.10.1016/j.sna.2018.08.006 ↗
3. Gerardo, C. D., Cretu, E., & Rohling, R. (2018). Fabrication and testing of polymer-based capacitive micromachined ultrasound transducers for medical imaging. Microsystems and Nanoengineering, 4, 19.10.1038/s41378-018-0022-5 ↗
4. Bespalova, K., Osterlund, E., Ross, G., Paulasto-Krockel, M., Sebastian, A. T., Karuthedath, C. B., Mertin, S., & Pensala, T. (2021). Characterization of AlScN-based multilayer systems for piezoelectric micromachined ultrasound transducer (pMUT) fabrication. Journal of Microelectromechanical Systems, 30, 290–298.10.1109/JMEMS.2021.3056928 ↗
5. Sadeghpour, S., Kraft, M., and Puers, R. (2019). Design and fabrication of a piezoelectric micromachined ultrasound transducer (pMUT) array for underwater communication, in 2019 International Congress on Ultrasonics, ICU 2019, September 3, 2019–September 6, 2019, p. 04500610.1121/2.0001053 ↗
6. Sadeghpour, S., Lips, B., Kraft, M., & Puers, R. (2020). Bendable piezoelectric micromachined ultrasound transducer (PMUT) arrays based on Silicon-On-Insulator (SOI) technology. Journal of Microelectromechanical Systems, 29, 378–386.10.1109/JMEMS.2020.2972729 ↗
7. Wang, H. R., Chen, Z. F., Yang, H., Jiang, H. B., & Xie, H. K. (2020). A ceramic PZT-based PMUT array for endoscopic photoacoustic imaging. Journal of Microelectromechanical Systems, 29, 1038–1043.10.1109/JMEMS.2020.3010773 ↗
8. Wang, H. R., Feng, P. X. L., and Xie, H. K. (2021). A high-density and dual-frequency PMUT array based on thin ceramic PZT for endoscopic photoacoustic imaging, in 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021, January 25, 2021–January 29, 2021, pp. 891–89410.1109/MEMS51782.2021.9375356 ↗
9. Alfaifi, A., Alhomoudi, I. A., Nabki, F., & El-Gamal, M. N. (2019). In-plane high-sensitivity capacitive accelerometer in a 3-D CMOS-compatible surface micromachining process. Journal of Microelectromechanical Systems, 28, 14–24.10.1109/JMEMS.2018.2877736 ↗
10. Guo, Y. X., Ma, Z. P., Zhang, T. F., Zheng, X. D., & Jin, Z. H. (2021). A stiffness-tunable MEMS accelerometer. Journal of Micromechanics and Microengineering, 31, 025005.10.1088/1361-6439/abcedb ↗
11. Li, P. C., Li, X. Y., Li, E. F., Shen, Q., and Chang, H. L. (2015). Design and fabrication of an in-plane SOI MEMS accelerometer with a high yield rate, in 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, April 7, 2015–April 11, 2015, pp. 511–51410.1109/NEMS.2015.7147480 ↗
12. Ma, Z. P., Jin, X. J., Guo, Y. X., Zhang, T. F., Jin, Y. M., Zheng, X. D., & Jin, Z. H. (2021). Pull-In dynamics of two MEMS parallel-plate structures for acceleration measurement. IEEE Sensors Journal, 21, 17686–17694.10.1109/JSEN.2021.3083784 ↗
13. Wang, S. D., Zhu, W. L., Shen, Y. J., Ren, J., and Wei, X. Y. (2020). In-plane dual-axis MEMS resonant accelerometer with a uniform sensitivity, in 7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020, March 23, 2020–March 26, 2020, pp. 1–410.1109/INERTIAL48129.2020.9090093 ↗
14. Purves, D. (2009). Neuroscience. Scholarpedia, 4, 7204.10.4249/scholarpedia.7204 ↗
15. Bao, M. H., "Electrostatic actuation," in Analysis and Design Principles of MEMS Devices, Bao, M. H., Ed., ed Amsterdam: Elsevier Science, 2005, pp. 175–212.10.1016/B978-044451616-9/50005-9 ↗
16. Bao, M. H. (2005). Capacitive sensing and effects of electrical excitation. In M. H. Bao (Ed.), Analysis and design principles of MEMS devices (pp. 213–245). Elsevier Science.10.1016/B978-044451616-9/50006-0 ↗
17. Arnau, A., & Soares, D. (2008). Fundamentals of piezoelectricity. In A. A. Vives (Ed.), Piezoelectric transducers and applications (pp. 1–38). Springer, Berlin Heidelberg.
18. Tadigadapa, S., & Mateti, K. (2009). Piezoelectric MEMS sensors: state-of-the-art and perspectives. Measurement Science & Technology, 20, 092001.10.1088/0957-0233/20/9/092001 ↗
19. Zhu, R. J., & Wang, Z. M. (2020). Piezoelectric one- to two-dimensional nanomaterials for vibration energy harvesting devices. In L. Tao & D. Akinwande (Eds.), Emerging 2D materials and devices for the internet of things (pp. 221–241). Elsevier.10.1016/B978-0-12-818386-1.00009-6 ↗
20. Korobova, N. (2017). Piezoelectric MEMS technologies. In K. Uchino (Ed.), Advanced piezoelectric materials (Second Edition) (pp. 533–574). Woodhead Publishing.10.1016/B978-0-08-102135-4.00014-X ↗
21. Wang, L. P., Wolf, R. A., Wang, Y., Deng, K. K., Zou, L. C., Davis, R. J., & Trolier-McKinstry, S. (2003). Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers. Journal of Microelectromechanical Systems, 12, 433–439.10.1109/JMEMS.2003.811749 ↗
22. Wang, Y. H., Song, P. F., Li, X., Ru, C. H., Ferrari, G., Balasubramanian, P., Amabili, M., Sun, Y., & Liu, X. Y. (2018). A paper-based piezoelectric accelerometer. Micromachines, 9, 19.10.3390/mi9010019 ↗
23. Gong, X. W., Chen, C. T., Wu, W. J., and Liao, W. H. (2019). A high sensitivity piezoelectric MEMS accelerometer based on aerosol deposition method, in Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2019, p. 109702610.1117/12.2514224 ↗
24. Yang, J., Zhang, M., He, Y. R., Su, Y., Han, G. W., Si, C. W., Ning, J., Yang, F. H., & Wang, X. D. (2019). A resonant Z-Axis aluminum nitride thin-film piezoelectric MEMS accelerometer. Micromachines, 10, 589.10.3390/mi10090589 ↗
25. Liu, Y., Hu, B. H., Cai, Y., Liu, W. J., Tovstopyat, A., & Sun, C. L. (2021). A novel tri-Axial piezoelectric MEMS accelerometer with folded beams. Sensors, 21, 453.10.3390/s21020453 ↗
26. Kim, D. H., Hewa-Kasakarage, N. N., & Hall, N. A. (2014). A theoretical and experimental comparison of 3–3 and 3–1 mode piezoelectric microelectromechanical systems (MEMS). Sensors and Actuators A: Physical, 219, 112–122.10.1016/j.sna.2014.08.006 ↗
27. Rahaman, A., Ishfaque, A., Jung, H., & Kim, B. (2019). Bio-inspired rectangular shaped piezoelectric MEMS directional microphone. IEEE Sensors Journal, 19, 88–96.10.1109/JSEN.2018.2873781 ↗
28. Bao, M. H. (2005). Piezoresistive sensing. In M. H. Bao (Ed.), Analysis and design principles of MEMS devices (pp. 247–304). Elsevier Science.10.1016/B978-044451616-9/50007-2 ↗
29. Bao, M. H. (2005). Introduction to MEMS devices. In M. H. Bao (Ed.), Analysis and design principles of MEMS devices (pp. 1–32). Elsevier Science.
30. Gao, L. B., Cao, K., Hu, X. K., Xiao, R., Gan, B., Wang, W. D., & Lu, Y. (2020). Nano electromechanical approach for flexible piezoresistive sensor. Applied Materials Today, 18, 100475.10.1016/j.apmt.2019.100475 ↗
31. Liu, W. C., & Watt, A. A. R. (2021). Solvodynamically printed silver nanowire/Ethylene- co-vinyl Acetate composite films as sensitive piezoresistive pressure sensors. ACS Applied Nano Materials, 4, 7905–7916.10.1021/acsanm.1c01229 ↗
32. Lu, M., Chen, M. H., Bu, Z. X., Wang, L. S., & Sun, L. (2019). Cyclic piezoresistive effect in poly(dimethylsiloxane)/carbon nanofiber composites for large strain Sensing applications. Journal of Intelligent Material Systems and Structures, 30, 1010–1017.10.1177/1045389X19828476 ↗
33. Sethy, D. and Balasubramanian, K. (2019). Piezoresistive type graphene nano platelet sensor for SHM application in structural components, in Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2019, March 4, 2019–March 7, 2019, p. 109702H10.1117/12.2515171 ↗
34. Sun, S. W., Han, B. G., Jiang, S., Yu, X., Wang, Y. L., Li, H. Y., & Ou, J. P. (2017). Nano graphite platelets-enabled piezoresistive cementitious composites for structural health monitoring. Construction and Building Materials, 136, 314–328.10.1016/j.conbuildmat.2017.01.006 ↗
35. Wang, L., Wu, J., Shang, M. H., Gao, F. M., Li, X. X., Zheng, Y. P., Zhang, D. D., Yang, W. Y., & Chen, S. L. (2021). Improved piezoresistive properties of ZnO/SiC nanowire heterojunctions with an optimized piezoelectric nanolayer. Journal of Materials Science, 56, 17146–17155.10.1007/s10853-021-06411-1 ↗
36. Preethi, A. A. P., & Karthigaikumar, P. (2020). Micro-machined silicon accelerometer with piezoresistive SCR implementation for glucolysis. International Journal of Wavelets, Multiresolution and Information Processing, 18, 1941013.10.1142/S0219691319410133 ↗
37. Wang, Y., Zhao, X. F., & Wen, D. Z. (2020). Fabrication and characteristics of a three-axis accelerometer with double L-shaped beams. Sensors (Basel), 20, 1780.10.3390/s20061780 ↗
38. Li, X. D., Li, X., Liu, T., Lu, Y., Shang, C. S., Ding, X. K., Zhang, J. C., Feng, Y. J., & Xu, F. J. (2021). Wearable, washable, and highly sensitive piezoresistive pressure sensor based on a 3D sponge network for real-time monitoring human body activities. ACS Applied Materials & Interfaces, 13, 46848–46857.10.1021/acsami.1c09975 ↗
39. Tan, Y. S., Ivanov, K., Mei, Z. Y., Li, H., Li, H. H., Lubich, L., Wang, C. X., & Wang, L. (2021). A soft wearable and fully-textile piezoresistive sensor for plantar pressure capturing. Micromachines, 12, 1–12.10.3390/mi12020110 ↗
40. Zhao, J. J., Chi, M., Fu, Y. L., Dong, Y., Wang, X. H., and Lin, L. W. (2019). Fiber-based piezoresistive wearable sensor for knittable tactile sensing, in 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, June 23, 2019–June 27, 2019, pp. 2436–243910.1109/TRANSDUCERS.2019.8808735 ↗
41. Pan, S. H., & Zhang, Z. N. (2019). Fundamental theories and basic principles of triboelectric effect: a review. Friction, 7, 2–17.10.1007/s40544-018-0217-7 ↗
42. Chen, B. D., Tang, W., He, C., Deng, C. R., Yang, L. J., Zhu, L. P., Chen, J., Shao, J. J., Liu, L., & Wang, Z. L. (2018). Water wave energy harvesting and self-powered liquid-surface fluctuation sensing based on bionic-jellyfish triboelectric nanogenerator. Materials Today, 21, 88–97.10.1016/j.mattod.2017.10.006 ↗
43. Li, X. J., Jiang, C. M., Zhao, F. N., Shao, Y. Z., Ying, Y. B., & Ping, J. F. (2020). A self-charging device with bionic self-cleaning interface for energy harvesting. Nano Energy, 73, 104738.10.1016/j.nanoen.2020.104738 ↗
44. Wang, Y., Liu, X. G., Wang, Y. W., Wang, H., Wang, H., Zhang, S. L., Zhao, T. C., Xu, M. Y., & Wang, Z. L. (2021). Flexible seaweed-like triboelectric nanogenerator as a wave energy harvester powering marine internet of things. ACS Nano, 15, 15700–15709.10.1021/acsnano.1c05127 ↗
45. Zhang, C. G., Zhao, Z. H., Yang, O., Yuan, W., Zhou, L. L., Yin, X., Liu, L., Li, Y. H., Wang, Z. L., & Wang, J. (2020). Bionic-fin-structured triboelectric nanogenerators for undersea energy harvesting. Advanced Materials Technologies, 5, 2000531.10.1002/admt.202000531 ↗
46. Zou, Y., Tan, P. C., Shi, B. J., Ouyang, H., Jiang, D. J., Liu, Z., Li, H., Yu, M., Wang, C., & Qu, X. C. (2019). A bionic stretchable nanogenerator for underwater sensing and energy harvesting. Nature Communications, 10, 1–10.10.1038/s41467-019-10433-4 ↗
47. Lee, J. W., Jung, S. W., Jo, J. Y., Han, G. H., Lee, D. M., Oh, J. Y., Hwang, H. J., Choi, D. H., Kim, S. W., Lee, J. H., Yang, C. D., & Baik, J. M. (2021). Sustainable highly charged C60-functionalized polyimide in a non-contact mode triboelectric nanogenerator. Energy and Environmental Science, 14, 1004–1015.10.1039/D0EE03057K ↗
48. Saadatania, Z., Mosanenzadeh, S. G., Esmailzadeh, E., and Naguib, H. (2018). Performance-enhanced triboelectric nanogenerator using polyimide aerogel for energy harvesting and sensing, in Smart Materials and Nondestructive Evaluation for Energy Systems IV 2018, March 5, 2018–March 6, 2018, p. 106010510.1117/12.2300268 ↗
49. Su, M., Brugger, J., and Kim, B. J. (2019). Wearable triboelectric generator based on a hybrid mix of carbon nanotube and polymer layers, in 18th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2018, December 4, 2018–December 7, 2018, p. 012047
50. Wang, F., Ren, Z. W., Nie, J. H., Tian, J. W., Ding, Y. F., & Chen, X. Y. (2020). Self-powered sensor based on bionic antennae arrays and triboelectric nanogenerator for identifying noncontact motions. Advanced Materials Technologies, 5, 1900789.10.1002/admt.201900789 ↗
51. Wang, S. Y., Xu, P., Wang, X. Y., Wang, H., Liu, C. X., Song, L. G., Xie, G. M., and Xu, M. Y. (2021). Bionic tactile sensor based on triboelectric nanogenerator for motion perception,. in 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, April 25, 2021 - April 29, 2021, pp. 1853–185710.1109/NEMS51815.2021.9451227 ↗
52. Wang, X. Y., Xu, P., Liu, J. H., Wang, S. Y., Chen, T. Y., Guan, T. Z., Tao, J., and Xu, M. Y. (2021). Semi-flexible bionic whisker sensor based on triboelectric nanogenerators, in 2nd International Conference on Artificial Intelligence and Electromechanical Automation, AIEA 2021, May 14, 2021–May 16, 2021, pp. 194–19810.1109/AIEA53260.2021.00049 ↗
53. Damjanovic, D. (1998). Ferroelectric, dielectric and piezoelectric properties of ferroelectric thin films and ceramics. Reports on Progress in Physics, 61, 1267.10.1088/0034-4885/61/9/002 ↗
54. Kepler, R. G. (1995). Ferroelectric, pyroelectric, and piezoelectric properties of poly (vinylidene fluoride). Plastics Engineering-New York, 28, 183–183.
55. Khanbareh, H. (2016). Expanding the functionality of piezo-particulate composites, Dissertation/Thesis, ProQuest Dissertations Publishing
56. Tolvanen, J., Hannu, J., & Jantunen, H. (2017). Hybrid foam pressure sensor utilizing piezoresistive and capacitive sensing mechanisms. IEEE Sensors Journal, 17, 4735–4746.10.1109/JSEN.2017.2718045 ↗
57. Zhang, Q., Liu, S., Luo, H. Q., Guo, Z., Hu, X. R., & Xiang, Y. (2020). Hybrid capacitive/piezoelectric visualized meteorological sensor based on in-situ polarized PVDF-TrFE films on TFT arrays. Sensors and Actuators, A: Physical, 315, 112286.10.1016/j.sna.2020.112286 ↗
58. Xue, F., Hu, J., Guo, Y., Han, G. W., Ouyang, Y., Wang, S. X., & He, J. L. (2020). Piezoelectric-piezoresistive coupling MEMS sensors for measurement of electric fields of broad bandwidth and large dynamic range. IEEE Transactions on Industrial Electronics, 67, 551–559.10.1109/TIE.2019.2893837 ↗
59. Yang, X., Li, P., Wu, B., Li, H. W., & Zhou, G. D. (2021). A flexible piezoelectric-triboelectric hybrid nanogenerator in one structure with dual doping enhancement effects. Current Applied Physics, 32, 50–58.10.1016/j.cap.2021.09.003 ↗
60. Ji, B., Zhou, Q., Hu, B., Zhong, J. W., Zhou, J., & Zhou, B. P. (2021). Bio-inspired hybrid dielectric for capacitive and triboelectric tactile sensors with high sensitivity and ultrawide linearity range. Advanced Materials, 33, 2100859.10.1002/adma.202100859 ↗
61. Ma, Z. H., Meng, B., Wang, Z. Y., Yuan, C. C., Liu, Z. W., Zhang, W. G., & Peng, Z. C. (2020). A triboelectric-piezoresistive hybrid sensor for precisely distinguishing transient processes in mechanical stimuli. Nano Energy, 78, 105216.10.1016/j.nanoen.2020.105216 ↗
62. Li, T., Luo, H., Qin, L., Wang, X. W., Xiong, Z. P., Ding, H. Y., Gu, Y., Liu, Z., & Zhang, T. (2016). Flexible capacitive tactile sensor based on micropatterned dielectric layer. Small (Weinheim an der Bergstrasse, Germany), 12, 5042–5048.10.1002/smll.201600760 ↗
63. Luo, Z. B., Duan, J. P., Xu, H. C., Wang, Y. Y., Liu, J. W., Yao, X., & Zhang, B. Z. (2021). Flexible capacitive pressure sensor based on an embedded rib fabric with a bionic sloping petal structure. IEEE Sensors Journal, 21, 20119–20128.10.1109/JSEN.2021.3097349 ↗
64. Wan, Y. B., Qiu, Z. G., Hong, Y., Wang, Y., Zhang, J. M., Liu, Q. X., Wu, Z. G., & Guo, C. F. (2018). A highly sensitive flexible capacitive tactile sensor with sparse and high-aspect-ratio microstructures. Advanced Electronic Materials, 4, 1700586.10.1002/aelm.201700586 ↗
65. Wang, J., Suzuki, R., Shao, M., Gillot, F., & Shiratori, S. (2019). Capacitive pressure sensor with wide-range, bendable, and high sensitivity based on the bionic Komochi Konbu structure and Cu/Ni nanofiber network. ACS Applied Materials and Interfaces, 11, 11928–11935.10.1021/acsami.9b00941 ↗
66. Zhang, P., Zhang, J., Li, Y., & Huang, L. S. (2021). Flexible and high sensitive capacitive pressure sensor with microstructured electrode inspired by ginkgo leaf. Journal of Physics D: Applied Physics, 54, 465401.10.1088/1361-6463/ac1ddc ↗
67. Yu, P., Liu, W. T., Gu, C. X., Cheng, X. Y., & Fu, X. (2016). Flexible piezoelectric tactile sensor array for dynamic three-axis force measurement. Sensors (Switzerland), 16, 819.10.3390/s16060819 ↗
68. Acer, M., Yildiz, A. F., and Bazzaz, F. H. (2017). Development of a soft PZT based tactile sensor array for force localization. in 26th International Conference on Information, Communication and Automation Technologies, ICAT 2017, October 26, 2017–October 28, 2017, pp. 1–610.1109/ICAT.2017.8171644 ↗
69. Cheng, X. Y., Gong, Y., Liu, Y. S., Wu, Z. Y., & Hu, X. D. (2020). Flexible tactile sensors for dynamic triaxial force measurement based on piezoelectric elastomer. Smart Materials and Structures, 29, 075007.10.1088/1361-665X/ab8748 ↗
70. Lee, J. W., Choi, W., Yoo, Y. K., Hwang, K. S., Lee, S. M., Kang, S. C., Kim, J. S., & Lee, J. H. (2014). A micro-fabricated force sensor using an all thin film piezoelectric active sensor. Sensors (Switzerland), 14, 22199–22207.10.3390/s141222199 ↗
71. Jung, Y. D., Lee, D. G., Park, J. H., Ko, H. H., & Lim, H. E. (2015). Piezoresistive tactile sensor discriminating multidirectional forces. Sensors (Switzerland), 15, 25463–25473.10.3390/s151025463 ↗
72. Gong, Y., Cheng, X. Y., Wu, Z. Y., Liu, Y. S., Yu, P., & Hu, X. D. (2021). A flexible tactile sensor array for dynamic triaxial force measurement based on aligned piezoresistive nanofibers. IEEE Sensors Journal, 21, 21989–21998.10.1109/JSEN.2021.3103781 ↗
73. Li, J., Orrego, S., Pan, J. J., He, P. S., & Kang, S. H. (2019). Ultrasensitive, flexible, and low-cost nanoporous piezoresistive composites for tactile pressure sensing. Nanoscale, 11, 2779–2786.10.1039/C8NR09959F ↗
74. Zhou, H., Zheng, L., Meng, Q. Y., Tang, R. X., Wang, Z. S., Dang, B. K., Shen, X. P., & Sun, Q. F. (2021). A flexible hydrogel tactile sensor with low compressive modulus and dynamic piezoresistive response regulated by lignocellulose/graphene aerogels. Journal of Materials Chemistry C, 9, 12895–12903.10.1039/D1TC02762J ↗
75. Jian, M. Q., Xia, K. L., Wang, Q., Yin, Z., Wang, H. M., Wang, C. Y., Xie, H. H., Zhang, M. C., & Zhang, Y. Y. (2017). Flexible and highly sensitive pressure sensors based on bionic hierarchical structures. Advanced Functional Materials, 27, 1606066.10.1002/adfm.201606066 ↗
76. Lee, D. H., Chuang, C. H., Shaikh, M. O., Dai, Y. S., Wang, S. Y., Wen, Z. H., Yen, C. K., Liao, C. F., & Pan, C. T. (2021). Flexible piezoresistive tactile sensor based on polymeric nanocomposites with gridtype microstructure. Micromachines, 12, 452.10.3390/mi12040452 ↗
77. Sun, X. G., Wang, C. K., Chi, C., Xue, N., & Liu, C. (2018). A highly-sensitive flexible tactile sensor array utilizing piezoresistive carbon nanotube-polydimethylsiloxane composite. Journal of Micromechanics and Microengineering, 28, 105011.10.1088/1361-6439/aaceb9 ↗
78. Tao, J., Bao, R. R., Wang, X. D., Peng, Y. Y., Li, J., Fu, S., Pan, C. F., & Wang, Z. L. (2019). Self-powered tactile sensor array systems based on the triboelectric effect. Advanced Functional Materials, 29, 1806379.10.1002/adfm.201806379 ↗
79. Yang, Y., Zhang, H. L., Lin, Z. H., Zhou, Y. S., Jing, Q. S., Su, Y. J., Yang, J., Chen, J., Hu, C. G., & Wang, Z. L. (2013). Human skin based triboelectric nanogenerators for harvesting biomechanical energy and as self-powered active tactile sensor system. ACS Nano, 7, 9213–9222.10.1021/nn403838y ↗
80. Chen, S. W., Cao, X., Wang, N., Ma, L., Zhu, H. R., Willander, M., Jie, Y., & Wang, Z. L. (2017). An ultrathin flexible single-electrode triboelectric-nanogenerator for mechanical energy harvesting and instantaneous force sensing. Advanced Energy Materials, 7, 1601255.10.1002/aenm.201601255 ↗
81. Wang, Z. L., & Zhu, G. (2014). Self-powered, ultra-sensitive, flexible tactile sensors based on contact electrification. Nano Letters, 14, 3208–3213.10.1021/nl5005652 ↗
82. Cheng, Y., Wu, D., Hao, S. F., Jie, Y., Cao, X., Wang, N., & Wang, Z. L. (2019). Highly stretchable triboelectric tactile sensor for electronic skin. Nano Energy, 64, 103907.10.1016/j.nanoen.2019.103907 ↗
83. Lee, D. G., Chung, J. H., Yong, H. S., Lee, S. M., & Shin, D. J. (2019). A deformable foam-layered triboelectric tactile sensor with adjustable dynamic range. International Journal of Precision Engineering and Manufacturing Green Technology, 6, 43–51.10.1007/s40684-019-00024-5 ↗
84. Cai, Y. W., Zhang, X. N., Wang, G. G., Li, G. Z., Zhao, D. Q., Sun, N., Li, F., Zhang, H. Y., Han, J. C., & Yang, Y. (2021). A flexible ultra-sensitive triboelectric tactile sensor of wrinkled PDMS/MXene composite films for E-skin. Nano Energy, 81, 105663.10.1016/j.nanoen.2020.105663 ↗
85. Ra, Y. S., La, M. W., Cho, S. M., Park, S. J., & Choi, D. W. (2021). Scalable batch fabrication of flexible, transparent and self-triggered tactile sensor array based on triboelectric effect. International Journal of Precision Engineering and Manufacturing Green Technology, 8, 519–531.10.1007/s40684-020-00267-7 ↗
86. Wang, J. J., Cui, P., Zhang, J. J., Ge, Y., Liu, X. L., Xuan, N. N., Gu, G. Q., Cheng, G., & Du, Z. (2021). A stretchable self-powered triboelectric tactile sensor with EGaIn alloy electrode for ultra-low-pressure detection. Nano Energy, 89, 106320.10.1016/j.nanoen.2021.106320 ↗
87. Yan, Z. G., Wang, L. L., Xia, Y. F., Qiu, R. D., Liu, W. Q., Wu, M., Zhu, Y., Zhu, S. L., Jia, C. Y., Zhu, M. M., Cao, R. R., Li, Z. L., & Wang, X. (2021). Flexible high-resolution triboelectric sensor array based on patterned laser-induced graphene for self-powered real-time tactile sensing. Advanced Functional Materials, 31, 2100709.10.1002/adfm.202100709 ↗
88. Fan, F. R., Lin, L., Zhu, G., Wu, W. Z., Zhang, R., & Wang, Z. L. (2012). Transparent triboelectric nanogenerators and self-powered pressure sensors based on micropatterned plastic films. Nano Letters, 12, 3109–3114.10.1021/nl300988z ↗
89. Lin, L., Xie, Y. N., Wang, S. H., Wu, W. Z., Niu, S. M., Wen, X. N., & Wang, Z. L. (2013). Triboelectric active sensor array for self-powered static and dynamic pressure detection and tactile imaging. ACS Nano, 7, 8266–8274.10.1021/nn4037514 ↗
90. Bai, P., Zhu, G., Jing, Q. S., Yang, J., Chen, J., Su, Y. J., Ma, J. S., Zhang, G., & Wang, Z. L. (2014). Membrane-based self-powered triboelectric sensors for pressure change detection and its uses in security surveillance and healthcare monitoring. Advanced Functional Materials, 24, 5807–5813.10.1002/adfm.201401267 ↗
91. Yang, Y., Zhang, H. L., Zhong, X. D., Yi, F., Yu, R. M., Zhang, Y., & Wang, Z. L. (2014). Electret film-enhanced triboelectric nanogenerator matrix for self-powered instantaneous tactile imaging. ACS Applied Materials & Interfaces, 6, 3680–3688.10.1021/am406018h ↗
92. Yang, J., Chen, J., Su, Y. J., Jing, Q. S., Li, Z. L., Yi, F., Wen, X. N., Wang, Z. N., & Wang, Z. L. (2015). Eardrum-inspired active sensors for self-powered cardiovascular system characterization and throat-attached anti-interference voice recognition. Advanced Materials, 27, 1316–1326.10.1002/adma.201404794 ↗
93. Zhu, G., Yang, W. Q., Zhang, T. J., Jing, Q. S., Chen, J., Zhou, Y. S., Bai, P., & Wang, Z. L. (2014). Self-powered, ultrasensitive, flexible tactile sensors based on contact electrification. Nano Letters, 14, 3208–3213.10.1021/nl5005652 ↗
94. Guo, H. J., Li, T., Cao, X. T., Xiong, J., Jie, Y., Willander, M., Cao, X., Wang, N., & Wang, Z. L. (2017). Self-sterilized flexible single-electrode triboelectric nanogenerator for energy harvesting and dynamic force sensing. ACS Nano, 11, 856–864.10.1021/acsnano.6b07389 ↗
95. Jiang, X. Z., Sun, Y. J., Fan, Z. Y., & Zhang, T. Y. (2016). Integrated flexible, waterproof, transparent, and self-powered tactile sensing panel. ACS Nano, 10, 7696–7704.10.1021/acsnano.6b03042 ↗
96. Lin, W. K., Wang, B., Peng, G. X., Shan, Y., Hu, H., & Yang, Z. B. (2021). Skin-inspired piezoelectric tactile sensor array with crosstalk-free row+column electrodes for spatiotemporally distinguishing diverse stimuli. Advanced Science, 8, 2002817.10.1002/advs.202002817 ↗
97. Spanu, A., Pinna, L., Viola, F., Seminara, L., Valle, M., Bonfiglio, A., & Cosseddu, P. (2016). A high-sensitivity tactile sensor based on piezoelectric polymer PVDF coupled to an ultra-low voltage organic transistor. Organic Electronics: Physics, Materials, Applications, 36, 57–60.10.1016/j.orgel.2016.05.034 ↗
98. Wang, J., Jiang, J. F., Zhang, C. C., Sun, M. Y., Han, S. W., Zhang, R. T., Liang, N., Sun, D. H., & Liu, H. (2020). Energy-efficient, fully flexible, high-performance tactile sensor based on piezotronic effect: piezoelectric signal amplified with organic field-effect transistors. Nano Energy, 76, 105050.10.1016/j.nanoen.2020.105050 ↗
99. Tang, H., Nie, P., Wang, R. R., & Sun, J. (2021). Piezoresistive electronic skin based on diverse bionic microstructure. Sensors and Actuators, A: Physical, 318, 112532.10.1016/j.sna.2020.112532 ↗
100. Zhu, L. F., Wang, Y. C., Mei, D. Q., & Wu, X. (2019). Highly sensitive and flexible tactile sensor based on porous graphene sponges for distributed tactile sensing in monitoring human motions. Journal of Microelectromechanical Systems, 28, 154–163.10.1109/JMEMS.2018.2881181 ↗