Large area deposition of YBaCuO thin films by means of hollow cathode sputtering
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Abstract
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Research context
OpenAlex topics: Physics of Superconductivity and Magnetism · Particle accelerators and beam dynamics · Copper Interconnects and Reliability
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References (2)
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1. H. Koch, L.J. Friedrich, V. Hinkel, F. Ludwig, B. Pollit and T. Schurig J. Vac. Sci. Technol. A9 (4), 237410.1116/1.577279 ↗
2. F. Ludwig, V. Hinkel, T. Schurig, J.-P. Müller, U. Stöβlein, H.-U. Müller, H. Koch Physica C 180, 8510.1016/0921-4534(91)90642-C ↗