Optical and femtosecond laser-induced damage-related properties of Ta2O5-based oxide mixtures
Source abstract
Abstract
In this study, four Ta 2O 5-based mixture coatings, including Ta 2O 5-TiO 2, Ta 2O 5-HfO 2, Ta 2O 5-Al 2O 3, and Ta 2O 5-SiO 2, are deposited via plasma-ion-assisted electron-beam co-evaporation and compared with a Ta 2O 5 monolayer coating. The chemical compositions, microstructures, and optical and femtosecond laser-induced damage threshold (LIDT) properties of the coatings are investigated. For different doping materials, when the refractive indices of the mixture coatings are close, the femtosecond LIDTs exhibit a considerable difference. The experimental results indicate that the Ta 2O 5-HfO 2 mixture coating exhibits a larger optical bandgap and higher femtosecond LIDT than other coatings. The 1-on-1 LIDT of the Ta 2O 5-HfO 2 mixture coating is approximately 1032.3 mJ/cm 2 (170 fs), which is 25% higher than that of the Ta 2O 5 monolayer coating. We believe the Ta 2O 5-HfO 2 mixture will be useful for various multilayer coatings such as chirped mirrors and other mirrors in femtosecond laser applications.
Source: expertdata · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Laser Material Processing Techniques · Solid State Laser Technologies · Laser-induced spectroscopy and plasma
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (50)
Show source-provided references
1. Femtosecond laser micromachining of diamond: current research status, applications and challenges10.1016/j.carbon.2021.04.025 ↗
2. Review of femtosecond laser direct writing fiber-optic structures based on refractive index modification and their applications10.1016/j.optlastec.2021.107473 ↗
3. Alternative applications of the femtosecond laser in ophthalmology10.3109/08820538.2010.518507 ↗
4. Femtosecond-laser assisted surgery of the eye: overview and impact of the low-energy concept10.3390/mi12020122 ↗
5. High-power 2 GHz fs pulsed all-fiber amplified laser system at 2.0 μm10.1364/OL.44.006001 ↗
6. Ultrafast, ultrahigh-peak, and high-average power Ti: sapphire laser system and its applications10.1109/2944.883381 ↗
7. Sub-40 fs, 1060-nm Yb-fiber laser enhances penetration depth in nonlinear optical microscopy of human skin10.1117/1.JBO.20.12.120501 ↗
8. High-energy hybrid femtosecond laser system demonstrating 2×10 PW capability10.1017/hpl.2020.41 ↗
9. 10 PW peak power femtosecond laser pulses at ELI-NP10.1017/hpl.2022.11 ↗
10. Enhancement of laser-induced damage threshold in chirped mirrors by electric field reallocation10.1364/OE.25.026537 ↗
11. Enhancement of the damage resistance of ultra-fast optics by novel design approaches10.1364/OE.25.031948 ↗
12. Large area ion beam sputtered dielectric ultrafast mirrors for petawatt laser beamlines10.1364/OE.452249 ↗
13. Laser-induced damage of multilayer dielectric for broadband pulse compression grating
14. Laser resistance dependence of interface for high-reflective coatings studied by capacitance-voltage and absorption measurement10.1364/OL.43.004538 ↗
15. Femtosecond laser damage resistance of oxide and mixture oxide optical coatings10.1364/OL.37.001478 ↗
16. Mixed oxide coatings for optics10.1364/AO.50.000C69 ↗
17. A comparative morphological study of electron beam co-deposited binary optical thin films of HfO2:SiO2 and ZrO2:SiO210.1016/j.cap.2007.10.061 ↗
18. Dichroic laser mirrors with mixture layers and sandwich-like-structure interfaces10.1364/PRJ.411372 ↗
19. Post deposition annealing of IBS mixture coatings for compensation of film induced stress10.1364/OME.6.002236 ↗
20. A study of coating mechanical and optical losses in view of reducing mirror thermal noise in gravitational wave detectors10.1088/0264-9381/27/8/084030 ↗
21. Exploration of co-sputtered Ta2O5-ZrO2 thin films for gravitational-wave detectors10.1088/1361-6382/ac1b06 ↗
22. An interlinked prediction-experiment paradigm discovering deep-ultraviolet fluorooxoborates with desired optical nonlinearity and birefringence10.1016/j.matt.2023.02.005 ↗
23. An exhaustive study of laser damage in ion beam sputtered pure and mixture oxide thin films at 1030 nm with 500 fs pulse durations
24. M. Fazio, L.Q. Barrera, A. Markosyan, R. Bassiri, M.M. Fejer, C.S. Menoniz, Growth and characterization of mixed Ta2O5 thin films by reactive biased target deposition, Optical Interference Coatings Conference (OIC) 2019, Optica Publishing Group, Santa Ana Pueblo, New Mexico, 2019, pp. FA.5. https://doi.org/10.1364/OIC.2019.FA.5.10.1364/OIC.2019.FA.5 ↗
25. Prediction of crystallized phases of amorphous Ta2O5-based mixed oxide thin films using a density functional theory database10.1063/5.0035573 ↗
26. Study of hafina-silica mixed coatings with different compositions prepared by e-beam co-evaporation
27. The Gaussian-Lorentzian sum, product, and convolution (Voigt) functions in the context of peak fitting x-ray photoelectron spectroscopy (XPS) narrow scans10.1016/j.apsusc.2018.03.190 ↗
28. Imaging photothermal microscopy for absorption measurements of optical coatings10.3788/COL20090711.1061 ↗
29. Characterization of amorphous Ta2O5 film as a novel anode material10.1149/1.1573194 ↗
30. C.D. Wanger, W.M. Riggs, L.E. Divis, J.F. Moulder G.E. Muilenberg. Handbook of X-ray photoelectron spectroscopy: a reference book of standard spectra for identification and interpretation of XPS data. First ed., Perkin-Elmer Corp., Minnesota, 1979, pp. 69, 145.
31. X-ray spectroscopic study of the electronic structure of visible-light responsive N-, C- and S-doped TiO210.1016/j.elspec.2007.09.002 ↗
32. Tuning defects in oxides at room temperature by lithium reduction10.1038/s41467-018-03765-0 ↗
33. Dielectric response of TiO2 ceramics: The crucial role of Ta2O510.1016/j.jallcom.2017.02.049 ↗
34. Structural evolution that affects the room-temperature internal friction of binary oxide nanolaminates: implications for ultrastable optical cavities10.1021/acsanm.0c02798 ↗
35. Effect of annealing on the properties of HfO2-Al2O3 mixture coatings for picosecond laser applications10.1016/j.apsusc.2021.152192 ↗
36. Y. Wen, W. Huang, B. Wang, A novel method for the preparation of Cu/ Al2O3 nanocomposite, Appl. Surf. Sci. 258 (7) (2012) 2935–2938. https://doi.org/10.1016/j.apsusc.2011.11.010.10.1016/j.apsusc.2011.11.010 ↗
37. V.N. Alexander, K.-V. Anna, W.G. Stephen, J.P. Cedric, NIST X-ray Photoelectron Spectroscopy Database, NIST, v4.1, 2012. http://dx.doi.org/10.18434/T4T88K. [dataset].
38. The structure and electrical properties of HfTaON high-k films prepared by DIBSD10.1016/j.apsusc.2011.11.015 ↗
39. Raman and x-ray photoelectron spectroscopy study of ferroelectric switching in Pb(Nb,Zr,Ti)O3
40. Effect of Ta incorporation on the microstructure, electrical and optical properties of Hf1−xTaxO high-k film prepared by dual ion beam sputtering deposition10.1016/j.vacuum.2012.11.007 ↗
41. Interface properties, physical and electrical characterization of sputtered TaAlOx on silicon-passivated n-GaAs substrates10.1007/s00339-014-8845-x ↗
42. Copper interaction with a ta silicate surface: Implications for interconnect technology10.1016/S0040-6090(02)00545-X ↗
43. Effective medium theories for composite optical materials in spectral ranges of weak absorption: The case of Nb2O5-SiO2 mixtures10.1088/0022-3727/41/21/215304 ↗
44. Optical properties and electronic structure of amorphous germanium10.1002/pssb.19660150224 ↗
45. Laser ablation threshold dependence on pulse duration for fused silica and corneal tissues: Experiments and modeling10.1364/JOSAA.24.001562 ↗
46. Optical thin films and coatings: From materials to applications
47. Investigation of laser damage in single layer coatings with pulse durations from 45fs to 24ps10.1117/12.867506 ↗
48. Comparison of damage and ablation dynamics of multilayer dielectric films initiated by few-cycle pulses versus longer femtosecond pulses10.1364/OL.389650 ↗
49. Laser lift-off initiated by direct induced ablation of different metal thin films with ultra-short laser pulses10.1088/0022-3727/45/31/315303 ↗
50. A novel laser shock post-processing technique on the laser-induced damage resistance of 1ω HfO2/SiO2 multilayer coatings10.1017/hpl.2021.4 ↗