journal article·2023-02

Influence of the deposition conditions on the magnetic properties of Fe–Co–N thin films

Zeyu Han, Chengji Song, Jie Zhou, Zhi Ma, Li Ma, Hua Gao, Fu Zheng

Publisher page

Abstract

(Fe 0.65Co 0.35) 1-xN x thin films were prepared by magnetron sputtering under various deposition conditions. Their structure and magnetic properties were studied systematically. A coercivity as low as 1.5 Oe was obtained with an optimal N content by adjusting the nitrogen partial pressure f N . Furthermore, the films exhibited resonance frequencies higher than 1 GHz and adjustable dynamic magnetic properties. The damping coefficient α was maintained at a low level of approximately 0.01 under an appropriate f N (4–10%). These effects were attributed to the composition and microstructure of the films, which directly determined the static magnetic properties and dynamic parameters of the films. Furthermore, under different deposition conditions with the same f N , the deposition rate, film thickness, and deposition gas pressure played significant roles in improving the magnetic properties of the films. Therefore, Fe–Co–N films with adjustable anisotropy are expected to be a potential material for microwave magnetic devices. Moreover, systematic studies of Fe–Co–N films can help optimize the magnetic properties of Fe–Co-based films.
Source: expertdata · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Magnetic properties of thin films · Magnetic Properties and Applications · Copper Interconnects and Reliability

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (52)

Show source-provided references
1. MFM observation of high coercivity in nanostructured tetragonally distorted FeCo films10.1109/TMAG.2020.3008718 ↗
2. Soft magnetic properties and microstructure of Fe65Co35 thin films with different underlayers10.1002/pssa.200521083 ↗
3. The physical boundaries to high-density magnetic recording10.1016/S0304-8853(99)00632-0 ↗
4. Practical FeCo films for perpendicular writer pole10.1109/TMAG.2011.2170155 ↗
5. Preparation of soft magnetic FeCo-based films for writers10.1063/1.3078008 ↗
6. Microstructure and magnetic properties of FeCoN thin films10.1063/1.367930 ↗
7. Soft magnetic materials for sensor applications in the high frequency range10.1016/j.jmmm.2017.11.051 ↗
8. Magnetic properties and high frequency characteristics of isotropic FeCoZr thin films with stripe domains10.1007/s10854-017-7678-8 ↗
9. The influence of film composition and annealing temperature on the microstructure and magnetic properties of FeCo thin films10.1007/s10854-017-6977-4 ↗
10. Large magneto-elastic anisotropy enhancement with temperature in composition-graded FeCoTa thin films10.1063/1.4825225 ↗
11. An investigation on the mechanical properties of soft magnetostrictive FeCoCr films by nanoindentation10.1016/j.jallcom.2021.160549 ↗
12. Soft anisotropic high magnetization Cu/FeCo films10.1063/1.1510163 ↗
13. FeCoSiN film with ordered FeCo nanoparticles embedded in a Si-rich matrix
14. Microstructures and magnetic properties of Co–Al–O granular thin films10.1063/1.371948 ↗
15. Grain size dependence of coercivity and permeability in nanocrystalline ferromagnets10.1109/20.104389 ↗
16. Enhancing the soft magnetic properties of FeGa with a non magnetic underlayer formicrowave applications10.1063/5.0007603 ↗
17. Underlayer effect on the soft magnetic, high frequency, and magnetostrictive properties of FeGa thin films10.1063/5.0011873 ↗
18. Multiple resonance peaks of FeCo thin films with NiFe underlayer10.1063/1.4905315 ↗
19. The doping effect of Al2O3 on the high-frequency electrical and magnetic properties of CoFeB soft magnetic thin films deposited on Si substrates using RF magnetron sputtering technique10.1007/s10854-020-04117-9 ↗
20. Soft magnetic property and magnetization reversal mechanism of Sm doped FeCo thin film for high-frequency application10.1016/j.tsf.2012.04.013 ↗
21. Influence of sputtering power on static and dynamic magnetic properties of FeCoN Films10.1109/LMAG.2015.2484279 ↗
22. Tuning microwave magnetic properties of FeCoN thin films by controlling dc deposition power10.1063/1.4894512 ↗
23. Influence of sputtering gas pressure on high-frequency soft magnetic properties of FeCoN thin film10.1109/TMAG.2011.2151834 ↗
24. Sandwich films properties of a new soft magnetic material10.1038/35025142 ↗
25. High frequency characteristics of FeCoN thin films fabricated by sputtering at various (Ar+N2) gas flow rates10.1063/1.2361160 ↗
26. Influence of stress and texture on soft magnetic properties of thin films10.1109/TMAG.2002.802705 ↗
27. Excellent soft magnetic properties realized in FeCoN thin films
28. Soft magnetic nanocrystalline materials10.1016/0956-716X(95)00397-E ↗
29. Crossover in the magnetic properties of nanostructured metals10.1016/S0921-5093(00)01753-6 ↗
30. Soft high saturation magnetization Fe–Co–N thin films for inductive write heads10.1109/20.908488 ↗
31. Magnetic properties and high frequency characteristics of FeCoN thin films10.1063/1.4943358 ↗
32. Microstructure and magnetic properties of FeCoHfN thin films deposited by DC reactive sputtering10.1016/j.jmmm.2021.168777 ↗
33. Tailoring the ultra-soft magnetic properties of sputtered FineMET thin films for high-frequency power applications10.1088/1742-6596/903/1/012050 ↗
34. Magnetic and microwave properties of amorphous FeCoNbBCu thin films10.1063/1.4938111 ↗
35. Improving the high-frequency magnetic properties of as-deposited CoFe films by ultra-low gas pressure10.1007/s10853-017-1794-y ↗
36. Evolution of structure and magnetic properties of nanocrystalline FeXN thin films via Ta and Al addition10.1088/1009-1963/14/6/031 ↗
37. The effect of AlO and C elements addition on magnetic properties and frequency response of FeCo alloy film
38. Generalization of Snoek's law to ferromagnetic films and composites10.1103/PhysRevB.77.104440 ↗
39. Bounds on the dynamic properties of magnetic materials10.1103/PhysRevB.62.11324 ↗
40. Classics in magnetics a phenomenological theory of damping in ferromagnetic materials10.1109/TMAG.2004.836740 ↗
41. Microstructure and magnetism of FeCo–SiO2 nano-granular films for high frequency application10.1088/0022-3727/40/12/016 ↗
42. Exchange bias of NiO/NiFe: linewidth broadening and anomalous spin-wave damping10.1063/1.1557964 ↗
43. Investigation into the microstructure and soft magnetic property of co-sputtering FeNi–MgO nanogranular films10.1007/s10853-019-03862-5 ↗
44. Influence of Si concentration on the magnetization dynamics in as-sputtered FeCoSiN thin films at high frequencies
45. Magnetic properties of FeCoC thin films prepared by various sputtering methods10.1088/1742-6596/303/1/012094 ↗
46. Improvement of soft magnetic properties and in-plane uniaxial magnetic anisotropy in FeCoAlO films fabricated by asymmetric targets10.1007/s00339-022-05403-5 ↗
47. Development and optimisation of thin soft ferromagnetic Fe–Co–Ta–N and Fe–Co–Al–N films with in-plane uniaxial anisotropy for HF applications10.1016/j.jmmm.2005.01.025 ↗
48. The thickness dependence of soft magnetic properties of (FeCo)–Al alloy thin films10.1109/TMAG.2017.2700320 ↗
49. Magnetic properties of sputtered Fe thin films: processing and thickness dependence10.1063/1.354926 ↗
50. Analysis of magnetic anisotropy of FeCoAlON thin films by the domain structures10.1016/j.matlet.2012.03.085 ↗
51. Understanding the dense stripe domains in soft magnetic film10.1016/j.apsusc.2015.04.010 ↗
52. High rate thick film growth10.1146/annurev.ms.07.080177.001323 ↗