Real time spectroscopic ellipsometry of CuInSe₂: Growth dynamics, dielectric function, and its dependence on temperature

Abstract This Letter reports real time spectroscopic ellipsometry studies of copper indium diselenide (CuInSe₂; CIS). A Volmer‐Weber nucleation process was identified from the measured thickness dynamics, and accurate dielectric functions were obtained in‐situ, avoiding oxidation while correcting for surface roughness. The energy and broadening parameters of the critical points in the dielectric functions obtained versus measurement temperature (including three previously unreported ones) yield a database that is valuable for on‐line materials analysis. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)