Properties and characteristics of wet (HF) and dry (RIE) etched borosilicate glass

Abstract Wet and dry etching methods were used to physically modify the surface of borosilicate glass for further measurements in roughness‐induced protein adsorption. The etching parameters determine the roughness of the glass surface while other parameters are not significantly changed. To exclude a chemical alteration of the surface, the isoelectric points, contact angles, and surface energies were analyzed before and after the etching process.