Source abstract
Abstract
In this paper, (InxAl1–xN/AlN) MQWs/InN/GaN heterostructure with a (InxAl1–xN/AlN) MQWs barrier layer and an InN channel layer is presented. The numerical calculations of 2DEG characteristics are made using a self‐consistent solution of the Schrödinger and Poisson equations. The influence of (InxAl1–xN/AlN) MQWs and InN layer on band diagrams, 2DEG sheet density and carrier confinement are studied. The results show that an InN insert layer can improve the carrier‐confinement ability without degrading the 2DEG sheet density in the heterostructure. The (InxAl1–xN/AlN) MQWs/InN/GaN heterostructure has both a larger 2DEG sheet density and better confinement of 2DEG than conventional InAlN/GaN and AlGaN/GaN heterojunctions. The 2DEG sheet density is as dramatically large as 3.85 × 1013 cm−2 with an AlN thickness of 1.5 nm, an In0.18Al0.82N thickness of 1.5 nm, an InN thickness of 0.5 nm, and pair number of 5. In addition, the influence of AlN thickness, InAlN thickness, indium content, and pair number on the 2DEG sheet density of the (InxAl1–xN/AlN) MQWs/InN/GaN heterostructure has been studied.
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Research context
OpenAlex topics: GaN-based semiconductor devices and materials · Ga2O3 and related materials · Semiconductor Quantum Structures and Devices
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Affiliations
KeyLab of Semiconductor Materials Science, Institute of Semiconductors Chinese Academy of Sciences Beijing P.R. China
School of Electronic Engineering Xi'an University of Posts and Telecommunications Xi'an P.R. China
Beijing Huajin Chuangwei Technology Co., Ltd. Beijing P.R. China
Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices Beijing P.R. China
Funding
Knowledge Innovation Project of the Chinese Academy of Sciences · National Nature Sciences Foundation of China · National Basic Research Program of China · National Science and Technology Major Project of China
References (30)
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