Novel scheme of ellipsometry utilizing parallel processing with arrayed photonic crystal

Abstract We propose a novel static parallel-processing ellipsometer consisting of arrays of photonic crystal polarizers and quarter-wave plates (QWP) having different orientations of the optical axes. On the basis of the autocloning technique, each array is monolithically integrated on a substrate in a single deposition process. The pattern of light transmitted through the two photonic crystals, a number of pairs of QWP, and polarizer with different axes is detected by an array of photodiodes, and the polarization is analyzed instantaneously from the image. No mechanical rotation or electrooptic modulation is necessary. Preliminary experiments of the ellipsometer are performed for the first time, and the principle of operation is confirmed. This type of ellipsometer is simple, compact, and robust, and therefore, will open up new applications for industrial use.