journal article·2019-06-03Open access

Discontinuous cracking of TiN films on a steel substrate induced by an adhesive interlayer

Tao Guo, Xiaolu Pang, Jianying He, Lijie Qiao

Philosophical Magazine Letters· Volume 99· Issue 6

Abstract

The basic mechanisms governing the process of cracking of single-layer brittle films have been extensively explored through both simulations and experiments. However, the role that an adhesive interlayer plays in the cracking of the overlying brittle film remains unclear. By performing three-point bending experiments, we observed that the insertion of a 100 nm thick Ti interlayer changed the cracking behaviour of TiN films from a continuous pattern to a discontinuous pattern. The slight change in the microstructure of the film and the increase in film thickness arising from the addition of the Ti interlayer are unlikely to cause the observed cracking morphology. The combination of the different interface between the Ti and the steel substrate and the fracture of the Ti interlayer are responsible for the transition in the TiN film cracking morphologies.
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Research context

OpenAlex topics: Metal and Thin Film Mechanics · Metal Forming Simulation Techniques · Copper Interconnects and Reliability

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Beijing Advanced Innovation Center for Materials Genome Engineering, Beijing, People’s Republic of China

Department of Materials Physics and Chemistry, University of Science and Technology Beijing, Beijing, People’s Republic of China

Corrosion and Protection Center, University of Science and Technology Beijing, Beijing, People’s Republic of China

Department of Structural Engineering, Norwegian University of Science and Technology (NTNU), Trondheim, Norway

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