Vacuum-based picking-up of thin chip from adhesive tape

The reliable picking-up of thin chip using the vacuum sorption determines the success rate of flip chip assemblies from donor tape to receptor substrate. An analytical solution to model the chip–adhesive–tape structure with vacuum loads is introduced to understand the fracture mechanism of chip picking-up. The critical process parameters (the length of bonded region, vacuum strength, and pick-up displacement, etc.) are investigated. Theoretical predictions are used in combination with virtual crack-closure-based finite-element technique to reveal the detaching behavior between the chip and the adhesive tape. The results show that the length of the bonded region should be controlled less than 40% of chip length to eliminate the effects of chip thickness, and the higher vacuum strength acting on the adhesive tape is able to accelerate the detachment of the chip from the adhesive tape. In particular, a process window is proposed to enhance the reliability and efficiency of picking-up for a thin chip.