Deposition of Highly Porous Nanocrystalline Platinum on Functionalized Substrates Through Fluorine‐Induced Decomposition of Pt(PF3)4 Adsorbates
Source abstract
Abstract
Nanocrystalline platinum is synthesized at room temperature by co-injecting Pt(PF3)4 and XeF2 vapors onto solid supports in vacuum. The Pt nucleation time scales with chemisorbed fluorine coverage, which is controlled by pre-dosing supports with XeF2, and by optional electron or ion beam irradiation under flowing XeF2. The latter is used to increase the chemisorbed fluorine coverage and localize the Pt growth process.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Semiconductor materials and devices · Catalytic Processes in Materials Science · Ion-surface interactions and analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
FEI Company 5350 NE Dawson Creek Drive Hillsboro OR 97214–5793 USA
School of Physics and Advanced Materials University of Technology, Sydney P.O. Box 123 Broadway New South Wales 2007 Australia
References (46)
Show source-provided references
1. 10.1002/adma.20110218210.1002/adma.201102182 ↗
2. 10.1021/cr900390210.1021/cr9003902 ↗
3. 10.1126/science.278.5339.83810.1126/science.278.5339.838 ↗
4. 10.1021/ja032011910.1021/ja0320119 ↗
5. 10.1002/adma.20120080610.1002/adma.201200806 ↗
6. 10.1038/3510462010.1038/35104620 ↗
7. Ralph T. R. · Met. Rev. · 2002 · 46 · 3
8. 10.1021/cr800339k10.1021/cr800339k ↗
9. 10.1021/cr068103910.1021/cr0681039 ↗
10. 10.1002/anie.20050076610.1002/anie.200500766 ↗
11. 10.1081/CR-20005746110.1081/CR-200057461 ↗
12. 10.1016/j.bioelechem.2003.10.03310.1016/j.bioelechem.2003.10.033 ↗
13. 10.1007/s10544-006-9045-z10.1007/s10544-006-9045-z ↗
14. 10.1080/1040843060093043810.1080/10408430600930438 ↗
15. 10.1116/1.295572810.1116/1.2955728 ↗
16. 10.1007/BF0061650110.1007/BF00616501 ↗
17. 10.1149/1.354507010.1149/1.3545070 ↗
18. 10.1088/0022-3727/37/24/01010.1088/0022-3727/37/24/010 ↗
19. 10.1021/ja01418a00810.1021/ja01418a008 ↗
20. 10.1021/cr60270a00210.1021/cr60270a002 ↗
21. 10.1021/jp075625z10.1021/jp075625z ↗
22. 10.1021/ac00128a04910.1021/ac00128a049 ↗
23. 10.1063/1.297758710.1063/1.2977587 ↗
24. 10.1088/0957-4484/20/37/37200110.1088/0957-4484/20/37/372001 ↗
25. 10.1002/adem.20050006110.1002/adem.200500061 ↗
26. 10.1002/adma.20100411410.1002/adma.201004114 ↗
27. 10.1116/1.176126610.1116/1.1761266 ↗
28. 10.1116/1.239596210.1116/1.2395962 ↗
29. 10.1016/j.mee.2007.12.03610.1016/j.mee.2007.12.036 ↗
30. 10.1116/1.325355110.1116/1.3253551 ↗
31. 10.1021/jp204189k10.1021/jp204189k ↗
32. The P Kαpeak overlaps with Pt Mα causing broadening of the low energy side of the net peak seen in the figure.
33. The conditioning treatment had to be repeated each time gas flow was terminated and the chamber was left in high vacuum for more than 3 h or if a vent cycle was performed likely due to F interactions with H2O and O2.
34. 10.1063/1.9056210.1063/1.90562 ↗
35. 10.1103/PhysRevB.23.82310.1103/PhysRevB.23.823 ↗
36. 10.1016/0039-6028(84)90140-710.1016/0039-6028(84)90140-7 ↗
37. 10.1016/0169-4332(91)90104-R10.1016/0169-4332(91)90104-R ↗
38. 10.1063/1.32635510.1063/1.326355 ↗
39. 10.1063/1.366292810.1063/1.3662928 ↗
40. 10.1016/0009-2614(75)80173-410.1016/0009-2614(75)80173-4 ↗
41. 10.1063/1.44090910.1063/1.440909 ↗
42. 10.1016/0009-2614(92)80014-310.1016/0009-2614(92)80014-3 ↗
43. 10.1103/PhysRevLett.109.14610310.1103/PhysRevLett.109.146103 ↗
44. 10.1088/0022-3727/42/12/12530510.1088/0022-3727/42/12/125305 ↗
45. 10.1149/1.240353410.1149/1.2403534 ↗
46. 10.1016/S0968-4328(99)00005-010.1016/S0968-4328(99)00005-0 ↗