Integration of atomically thin layers of transition metal dichalcogenides into high-Q, monolithic Bragg-cavities: an experimental platform for the enhancement of the optical interaction in 2D-materials

We demonstrate a new approach to integrate single layer MoSeR2R and WSeR2R\nflakes into monolithic all-dielectric planar high-quality micro-cavities. These\ndistributed-Bragg-reflector (DBR) cavities may e.g. be tuned to match the\nexciton resonance of the 2D-materials. They are highly robust and compatible\nwith cryogenic and room-temperature operation. The integration is achieved by a\ncustomized ion-assisted physical vapor deposition technique, which does not\ndegrade the optical properties of the 2D-materials. The monolithic 2D resonator\nis shown to have a high Q-factor in excess of 4500. We use photoluminescence\n(PL) experiments to demonstrate that the coating procedure with an SiO2 coating\non a prepared surface does not significantly alter the electrooptical\nproperties of the 2D-materials. Moreover, we observe a resonance induced\nmodification of the PL-spectrum for the DBR embedded flake. Our system thus\nrepresents a versatile platform to resonantly enhance and tailor\nlight-matter-interaction in 2D-materials. The gentle processing conditions\nwould also allow the integration of other sensitive materials into these highly\nresonant structures.\n