Optical switching performance of thermally oxidized vanadium dioxide with an integrated thin film heater

Optical switching performance of vanadium dioxide produced by thermal oxidation of vanadium is presented in this paper. A 100nm thick vanadium was oxidized under controlled conditions in a quartz tube furnace to produce approximately 200nm thick VO₂. The substrate was appropriately coated on the front and back side to reduce reflection in the cold state, and an integrated thin film heater was fabricated to allow in-situ thermal cycling. Electrical measurements show a greater than three orders of magnitude change in resistivity during the phase transition. Optical measurements exhibit 70% transparency at 1500nm and about 15dB extinction across a wide spectral band between 1000nm and 3000nm. These results are used to show a huge optical bistability effect in VO₂-based devices.