Polarization-dependent scattering properties of single-crystalline silicon nanocylindroids

Silicon nanostructures have been attracting increasing attention as nanoscale Mie scatters for various applications due to the subwavelength light concentration capability endowed by its high refractive index and the fabrication compatibility with the chip manufacturing processes. In this work, we investigate the polarization-dependent scattering properties of lithographic single-crystalline silicon nanocylindroids at the visible range. Both simulated and experimental studies were carried out to reveal the electric and magnetic resonance modes that occur in the silicon nanocylindroids. Systematic control experiments were conducted to demonstrate the polarization and size dependence of the resonance-induced scattering peaks. The unique anisotropic optical property of lithographically fabricated Si nanostructures at the single particle resolution provides an extra freedom to design silicon-based optical elements at the visible range for enhanced light-matter interactions.