Highly sensitive integrated flexible tactile sensors with piezoresistive Ge 2 Sb2Te5 thin films
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Abstract
Abstract Flexible tactile sensor has been extensively investigated as a key component for emerging electronics applications such as robotics, wearable devices, computer hardware, and security systems. Tactile sensors based on various one-dimensional materials have been widely explored. However, precise control of the direction and distribution of these nanomaterials remains a great challenge, and it has been difficult to scale down the device. Here, we introduce highly sensitive integrated flexible tactile sensors based on uniform phase-change Ge2Sb2Te5 (GST) thin films that can scale device size down, at least, to micrometer range. Significant piezoresistive effect has been observed in GST-based sensors, showing a giant gauge factor of 338. A proof of concept 5 × 5 sensor array functioning as a touch panel has been demonstrated. Also, the flexible GST tactile sensor has been utilized for monitoring of radial artery pulse. In addition to the well-known tunable electrical and optical properties, the piezoresistive GST films provide a versatile platform for the integration of sensing, recording, and displaying functions.
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Research context
OpenAlex topics: Phase-change materials and chalcogenides · Ocular and Laser Science Research · Advanced Sensor and Energy Harvesting Materials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (44)
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