journal article·2019-05-17Open access

Dry release transfer of graphene and few-layer h-BN by utilizing thermoplasticity of polypropylene carbonate

Kei Kinoshita, Rai Moriya, Momoko Onodera, Yusai Wakafuji, Satoru Masubuchi, Kenji Watanabe, Takashi Taniguchi, Tomoki Machida

Abstract

Abstract We demonstrate the dry release transfer of single-layer and bi-layer graphene and few-layer h-BN by utilizing poly(propylene) carbonate (PPC) films. Because of the strong adhesion between PPC and 2D materials around room temperature, we demonstrate that single-layer to few-layer graphene, as well as few-layer h-BN can be fabricated on a spin-coated PPC film/SiO2/Si substrate via the mechanical exfoliation method. In addition, we show that these single-layer to few-layer crystals are clearly distinguishable using an optical microscope with the help of optical interference. Because of the thermoplastic properties of PPC film, the adhesion between the 2D materials and PPC significantly decreases at about 70 °C. Therefore, by tuning the temperature, the graphene and h-BN flakes on PPC can be easily dry-transferred onto another h-BN substrate. We demonstrate the fabrication of encapsulated h-BN/graphene/h-BN devices and graphene/few-layer h-BN/graphene vertical-tunnel-junction devices using this method. Our finding provides a simple method for constructing high-quality graphene and h-BN-based van der Waals heterostructures with a minimum amount of polymer contamination.
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Graphene research and applications · 2D Materials and Applications · Nanowire Synthesis and Applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (44)

Show source-provided references
1. Geim, A. K. & Grigorieva, I. V. Van der Waals heterostructures. Nature 499, 419–425 (2013).10.1038/nature12385 ↗
2. Novoselov, K. S., Mishchenko, A., Carvalho, A. & Castro Neto, A. H. 2D materials and van der Waals heterostructures. Science 353, aac9439 (2016).10.1126/science.aac9439 ↗
3. Frisenda, R. et al. Recent progress in the assembly of nanodevices and van der Waals heterostructures by deterministic placement of 2D materials. Chem. Soc. Rev. 47, 53–68 (2018).10.1039/C7CS00556C ↗
4. Dean, C. R. et al. Boron nitride substrates for high-quality graphene electronics. Nat. Nanotech. 5, 722–726 (2010).10.1038/nnano.2010.172 ↗
5. Castellanos-Gomez, A. et al. Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping. 2D Mater. 1, 011002 (2014).10.1088/2053-1583/1/1/011002 ↗
6. Taychatanapat, T., Watanabe, K., Taniguchi, T. & Jarillo-Herrero, P. Quantum Hall effect and Landau-level crossing of Dirac fermions in trilayer graphene. Nat. Phys. 7, 621–625 (2011).10.1038/nphys2008 ↗
7. Kretinin, A. V. et al. Electronic properties of graphene encapsulated with different two-dimensional atomic crystals. Nano Lett. 14, 3270–3276 (2014).10.1021/nl5006542 ↗
8. Wang, L. et al. One-dimensional electrical contact to a two-dimensional material. Science 342, 614–617 (2013).10.1126/science.1244358 ↗
9. Zomer, P. J., Guimarães, M. H. D., Brant, J. C., Tombros, N. & Van Wees, B. J. Fast pick up technique for high quality heterostructures of bilayer graphene and hexagonal boron nitride. Appl. Phys. Lett. 105, 013101 (2014).10.1063/1.4886096 ↗
10. Pizzocchero, F. et al. The hot pick-up technique for batch assembly of van der Waals heterostructures. Nat. Commun. 7, 11894 (2016).10.1038/ncomms11894 ↗
11. Masubuchi, S. et al. Autonomous robotic searching and assembly of two-dimensional crystals to build van der Waals superlattices. Nat. Commun. 9, 1413 (2018).10.1038/s41467-018-03723-w ↗
12. Cui, X. et al. Multi-terminal transport measurements of MoS2 using a van der Waals heterostructure device platform. Nat. Nanotechnol. 10, 534–540 (2015).10.1038/nnano.2015.70 ↗
13. Li, L. et al. Quantum oscillations in a two-dimensional electron gas in black phosphorus thin films. Nat. Nanotechnol. 10, 608 (2015).10.1038/nnano.2015.91 ↗
14. Xi, X. et al. Ising pairing in superconducting NbSe2 atomic layers. Nat. Phys. 12, 139–143 (2016).10.1038/nphys3538 ↗
15. Yabuki, N. et al. Supercurrent in van der Waals Josephson junction. Nat. Commun. 7, 10616 (2016).10.1038/ncomms10616 ↗
16. Kim, M. et al. Strong proximity Josephson coupling in vertically stacked NbSe2–graphene–NbSe2 van der Waals Junctions. Nano Lett. 17, 6125–6130 (2017).10.1021/acs.nanolett.7b02707 ↗
17. Singh, V. et al. Optomechanical coupling between a multilayer graphene mechanical resonator and a superconducting microwave cavity. Nat. Nanotechnol. 9, 820–824 (2014).10.1038/nnano.2014.168 ↗
18. Ota, Y. et al. Optical coupling between atomically thin black phosphorus and a two dimensional photonic crystal nanocavity. Appl. Phys. Lett. 110, 223105 (2017).10.1063/1.4984597 ↗
19. Palacios-Berraquero, C. et al. Large-scale quantum-emitter arrays in atomically thin semiconductors. Nat. Commun. 8, 15093 (2017).10.1038/ncomms15093 ↗
20. Li, D. et al. Two-dimensional non-volatile programmable p–n junctions. Nat. Nanotechnol. 12, 901–906 (2017).10.1038/nnano.2017.104 ↗
21. Xie, H., Jiang, S., Shan, J. & Mak, K. F. Valley-selective exciton bistability in a suspended monolayer semiconductor. Nano Lett. 18, 3213–3220 (2018).10.1021/acs.nanolett.8b00987 ↗
22. Lee, J., Wang, Z., Xie, H., Mak, K. F. & Shan, J. Valley magnetoelectricity in single-layer MoS2. Nat. Mater. 16, 887–891 (2017).10.1038/nmat4931 ↗
23. Yamasaki, Y. et al. Exfoliation and van der Waals heterostructure assembly of intercalated ferromagnet Cr1/3TaS2. 2D Mater. 4, 041007 (2017).10.1088/2053-1583/aa8a2b ↗
24. Arai, M. et al. Construction of van der Waals magnetic tunnel junction using ferromagnetic layered dichalcogenide. Appl. Phys. Lett. 107, 103107 (2015).10.1063/1.4930311 ↗
25. Uwanno, T., Hattori, Y., Taniguchi, T., Watanabe, K. & Nagashio, K. Fully dry PMMA transfer of graphene on h -BN using a heating/cooling system. 2D Mater. 2, 041002 (2015).10.1088/2053-1583/2/4/041002 ↗
26. Goler, S. et al. Self-assembly and electron-beam-induced direct etching of suspended graphene nanostructures. J. Appl. Phys. 110, 064308 (2011).10.1063/1.3633260 ↗
27. Tien, D. H. et al. Study of graphene-based 2D-heterostructure device fabricated by all-dry transfer process. ACS Appl. Mater. Interfaces 8, 3072–3078 (2016).10.1021/acsami.5b10370 ↗
28. Blake, P. et al. Making graphene visible. Appl. Phys. Lett. 91, 063124 (2007).10.1063/1.2768624 ↗
29. Ni, Z. H. et al. Graphene thickness determination using reflection and contrast spectroscopy. Nano Lett. 7, 2758–2763 (2007).10.1021/nl071254m ↗
30. Byrnes, S. J. Multilayer optical calculations. arXiv: 1603.02720 (2016).
31. Luinstra, G. A. & Borchardt, E. in Synthetic Biodegradable Polymers 29–48 (Springer, Berlin, Heidelberg, 2012).10.1007/12_2011_126 ↗
32. Philipp, H. R. in Handbook of Optical Constants of Solids (ed. Palik, E. D.) 749–763 (Academic Press, Cambridge, 1997).10.1016/B978-012544415-6.50038-8 ↗
33. Edwards, D. F. in Handbook of Optical Constants of Solids (ed. Palik, E. D.) 547–569 (Academic Press, Cambridge, 1997).10.1016/B978-012544415-6.50027-3 ↗
34. Gorbachev, R. V. et al. Hunting for monolayer boron nitride: optical and Raman signatures. Small 7, 465–468 (2011).10.1002/smll.201001628 ↗
35. Wang, J. I.-J. et al. Electronic transport of encapsulated graphene and WSe2 devices fabricated by pick-up of prepatterned hBN. Nano Lett. 15, 1898–1903 (2015).10.1021/nl504750f ↗
36. Jessen, B. S. et al. Lithographic band structure engineering of graphene. Nat. Nanotechnol. 14, 340–346 (2019).10.1038/s41565-019-0376-3 ↗
37. Wang, S. et al. Structure and properties of poly(Propylene Carbonate). Int. J. Polym. Anal. Charact. 3, 131–143 (1997).10.1080/10236669708032759 ↗
38. Barreau, V., Yu, D., Hensel, R. & Arzt, E. Elevated temperature adhesion of bioinspired polymeric micropatterns to glass. J. Mech. Behav. Biomed. Mater. 76, 110–118 (2017).10.1016/j.jmbbm.2017.04.007 ↗
39. Larentis, S. et al. Reconfigurable complementary monolayer MoTe2 field-effect transistors for integrated circuits. ACS Nano 11, 4832–4839 (2017).10.1021/acsnano.7b01306 ↗
40. Mayorov, A. S. et al. Micrometer-scale ballistic transport in encapsulated graphene at room temperature. Nano Lett. 11, 2396–2399 (2011).10.1021/nl200758b ↗
41. Greenaway, M. T. et al. Tunnel spectroscopy of localised electronic states in hexagonal boron nitride. Commun. Phys. 1, 94 (2018).10.1038/s42005-018-0097-1 ↗
42. Britnell, L. et al. Electron tunneling through ultrathin boron nitride crystalline barriers. Nano Lett. 12, 1707–1710 (2012).10.1021/nl3002205 ↗
43. Kamalakar, M. V., Dankert, A., Bergsten, J., Ive, T. & Dash, S. P. Enhanced tunnel spin injection into graphene using chemical vapor deposited hexagonal boron nitride. Sci. Rep. 4, 6146 (2014).10.1038/srep06146 ↗
44. Yamaguchi, T. et al. Electrical spin injection into graphene through monolayer hexagonal boron nitride. Appl. Phys. Express 6, 073001 (2013).10.7567/APEX.6.073001 ↗