Dynamic characteristics of MEMS inertial devices under high g-force

To study dynamic characteristics of micro-inertial components under high load, a dynamical equation including the effect of dead load (constant acceleration) is discussed. The effects were analysed with finite element method. The results show the natural frequencies of microstructure increase as the inertial force increase. A dynamic testing experimental instrument was developed, and experiment was carried out. The instrument is capable of generating a high g-force environment, imposing impact on microstructure and measuring the response signal. The experimental results show that the natural frequencies of microstructure increase as the environmental acceleration increase, and that is consistent with theoretical analysis.