A study of the nanomachining and nanopatterning on different materials using atomic force microscopy

This study investigated the nanomachining and nanopatterning on different materials using an atomic force microscope. Straight-line nanomachining was applied to materials, namely, mica, polycarbonate (PC), and gold, under different loading forces in order to understand the appearance and the accumulation of chips of different materials after nanomachining. This study discusses nanopatterning capabilities upon by NanoLithography software on PC, and gold. The results show that the loading force of the probe is greater, the cutting depth would also increase, and the trend showed logarithmic. And the chip accumulation behaviour on mica, PC and gold is different. This study successfully fabricated micro-scaled Chinese characters on PC and circular nano-patterns with a diameter of 500 nm and complex nano-patterns (1,000 nm ´ 1,000 nm) by the linear combination on the gold sample. It found that segments of circular shape consisting of straight lines can affect the outside shape of the circle.