Micro and nano electrical discharge machining in microfluidics and micro nanotechnology
Source abstract
Abstract
Potential applications of micro and nano EDM in the research in micro nanotechnology and microfluidics are first discussed. Milling EDM, one variation of EDM, is proposed as a flexible tool for such applications. In practice EDM milling is a process rarely used because it is difficult to prepare thin electrode tools. Therefore the use of electrochemically etched Pt-Ir electrode tool for EDM machining is demonstrated. In addition a compact micro EDM machine is described. Preliminary results concerning the micromachining of silicon are also shown.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Advanced Machining and Optimization Techniques · Advanced machining processes and optimization · Advanced Surface Polishing Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (12)
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