journal article·2024-07

Non-contact near-field cavity perturbation method for quantitative dielectric measurement and metallic defect inspection

Cuiling Peng, Xiaolong Chen, Jinsong Zhan, Zhuo Chen, Fushun Nian, Huiting Huan

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OpenAlex topics: Microwave and Dielectric Measurement Techniques · Near-Field Optical Microscopy · Integrated Circuits and Semiconductor Failure Analysis

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