A cumulative fatigue damage model of polysilicon films for MEMS resonator under repeated loadings
Source abstract
Abstract
Abstract Prior work is primarily focused on observation and analysis of experimental results of fatigue loadings, while an insightful damage model describing the evolvement of distributed micro/nano cracks before they can be readily observed is still missing. A fatigue damage model is developed to quantify the damage due to micro/nano cracking in crystalline silicon structure and the native oxide layer. From the physical point of view, the developed model links the fatigue life to average crack length, maximum applied stress, resonant frequency and stiffness. The effectiveness of the proposed damage model is verified through simulations and experimental results from previous work.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Advanced MEMS and NEMS Technologies · Acoustic Wave Resonator Technologies · Mechanical and Optical Resonators
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
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